2005
DOI: 10.1016/j.sna.2004.12.032
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MEMS power generator with transverse mode thin film PZT

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Cited by 717 publications
(437 citation statements)
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“…In a floor or wall integration scenario, being the typical deployment configuration of the UWB SIW cavity-backed slot antenna on cork substrate, thermal energy harvesting may not be relevant. Then, vibrational energy harvesting based on the piezoelectric effect may be used instead [16]. To ensure stable performance of the SIW antennas after hardware integration, the solar cells are attached to the conducting parts of the antenna without extending beyond them, and without covering the radiating element.…”
Section: B) Energy Harvesting and Power Management Hardwarementioning
confidence: 99%
“…In a floor or wall integration scenario, being the typical deployment configuration of the UWB SIW cavity-backed slot antenna on cork substrate, thermal energy harvesting may not be relevant. Then, vibrational energy harvesting based on the piezoelectric effect may be used instead [16]. To ensure stable performance of the SIW antennas after hardware integration, the solar cells are attached to the conducting parts of the antenna without extending beyond them, and without covering the radiating element.…”
Section: B) Energy Harvesting and Power Management Hardwarementioning
confidence: 99%
“…At volumes smaller than 0.5 cm 3 the electromagnetic transformation factor is reduced abruptly [61]. The piezoelectric mechanism has the highest energy conversion efficiency [63,64] and is the most appropriate technology for the scale of MEMS devices [65,66].…”
Section: Mems Devices Based On Piezoelectric Transduction Mechanismmentioning
confidence: 99%
“…It is a reason to use this mode but the structure shown at Figure 29 is not feasible since the direction of the induced electric field in 33 mode is parallel to the stress direction. The interdigitated electrode, IDE, configuration presented by Jeon et al at [66] and Park et al at [87] enables to employ the 33 mode and discards the bottom electrode layer, Figure 30. Therefore, the electrode lengths and shapes are important parameters that affect the output voltage due to the non uniformity of the strain along the beam [88].…”
Section: Piezoelectric Energy Harverstersmentioning
confidence: 99%
“…Many unimorph cantilever-type harvesters (i.e. consisting of a piezoelectric film and an elastic layer to support the piezoelectric film and to control vibration characteristics) have been proposed for PVEHs [1216]. Because the configuration of a unimorph cantilever is simple and the fabrication process is relatively easy, many unimorph harvesters are fabricated using piezoelectric materials such as lead zirconate titanate (PZT) and polyvinylidene fluoride (PVDF).…”
Section: Introductionmentioning
confidence: 99%