2009
DOI: 10.1109/jmems.2009.2013392
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MEMS Scanning Calorimeter With Serpentine-Shaped Platinum Resistors for Characterizations of Microsamples

Abstract: We report a new design and operation of a microelectromechanical systems (MEMS) differential scanning calorimeter (DSC) for heat-capacity measurements. The sensor consists of a 500-nm silicon nitride membrane supported by four bridges on a silicon wafer. On one side of the membrane, a serpentineshaped platinum layer is deposited and used as both a resistive heater and a thermometer during the DSC measurement. This MEMS design can provide a self-alignment between the DSC cell and the material to be analyzed in … Show more

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Cited by 19 publications
(10 citation statements)
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“…[ 1,2 ] Microstructured platinum has been used in a variety of fields from electronics, sensors, and microelectromechanical systems (MEMS) to Lab‐on‐a‐Chip (LOC) devices, cochlear implants, and fuel cells. [ 3–8 ] Pt is used for manufacturing of microheaters, [ 9,10 ] temperature‐, [ 11,12 ] gas‐, [ 13 ] flow‐, [ 14 ] or biosensors [ 15,16 ] as well as catalysts for fuel cells [ 7,17,18 ] and dye sensitized solar cells [ 19–21 ] to name but a few. However, microstructuring of Pt is challenging and usually done by physical vapor deposition (PVD) techniques such as electron beam deposition or sputtering.…”
Section: Introductionmentioning
confidence: 99%
“…[ 1,2 ] Microstructured platinum has been used in a variety of fields from electronics, sensors, and microelectromechanical systems (MEMS) to Lab‐on‐a‐Chip (LOC) devices, cochlear implants, and fuel cells. [ 3–8 ] Pt is used for manufacturing of microheaters, [ 9,10 ] temperature‐, [ 11,12 ] gas‐, [ 13 ] flow‐, [ 14 ] or biosensors [ 15,16 ] as well as catalysts for fuel cells [ 7,17,18 ] and dye sensitized solar cells [ 19–21 ] to name but a few. However, microstructuring of Pt is challenging and usually done by physical vapor deposition (PVD) techniques such as electron beam deposition or sputtering.…”
Section: Introductionmentioning
confidence: 99%
“…Several different configurations of micro-DSC for liquid sample appeared in recent years. Olson [2] and Youssef [16] studied the scanning calorimeter with liquid samples, yet their uses are limited to measure latent heat of transformation due to evaporation. Yao [17] built an AC calorimeter with glass capillary tube that consumed 10µL liquid.…”
Section: Introductionmentioning
confidence: 99%
“…When applied to characterizing biomolecular interactions and conformational transitions [1], DSC allows universally applicable, direct, label-free (i.e., the biomolecules are not labeled by florescent, enzymatic or radioactive material) detection [2], and is widely used in determining the thermodynamic properties of biomolecular interactions and conformational transitions [3,4]. However, the practical use of conventional DSC instruments is impeded by low throughput, large sample consumption and complicate construction [5].…”
Section: Introductionmentioning
confidence: 99%