MEMS Sensor of Force

Hart'anský, R.; Hricko, J.; Mierka, M.; Halgoš, Ján; Dzuriš, M.

doi:10.20537/nd200107

Cited by 1 publication

(3 citation statements)

References 9 publications

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“…The interval

depends on force applied to the transducer as follows:

where

MHz is the maximal

output frequency,

MHz is the minimal

output frequency,

is the vacuum permittivity,

is the relative permittivity, S is the surface of the capacitor plates,

is a mechanical constant describing the change in the distance between the plates of the capacitor depending on the force applied to the transducer,

is the distance between the capacitor plates with no force applied, L is the coil inductance of the transducer, and F is the applied force to the transducer. A closer analysis is in [ 10 ].

…”

Section: Measurement and Experimental Resultsmentioning

confidence: 99%

“…The measured transfer characteristic shown in Figure 17 is nonlinear, as expected based on the curve of rising force (see Equation ( 15 )). The normalized transfer characteristics measured by utilizing the

supply current measurement presented in this study is compared to results in [ 10 ] in Figure 18 a,b.…”

Section: Measurement and Experimental Resultsmentioning

confidence: 99%

“…Different

designs and materials were tested and are presented in [ 9 ]. The mechanical body was cut out of Teflon using a water jet, according to [ 10 ] with dimensions of

mm. The

inductor comprises a silver wire, and the capacitor was constructed by applying a silver layer to parallel plates of a

.…”

Section: Operation Principlementioning

confidence: 99%

See 2 more Smart Citations

Towards a MEMS Force Sensor via the Electromagnetic Principle

Hartansky

Mierka

Jančárik

et al. 2023

Sensors

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Force measurement is a science discipline that experiences significant progress with the introduction of new materials and evaluation methods. Many different sensor types, working on different principles, have been developed and reviewed and have found use in medicine as well as many other industries. New trends and demands require a size reduction and simple applicability, with the use of, for example, micro electromechanical systems (MEMS). For purposes of this study, the initial MEMS body is supplemented by its scaled version. Force measurement in this study works on the force to time-delay conversion principle. A compact compliant mechanical body (CCMB) with an embedded parallel resonant circuit (PRC) acting as a transducer realizes the conversion. Depending on the resonant frequency of the transducer (CCMB or MEMS), we have measured the applied force based on the reverse influence of the transducer on the surrounding EM field. The analysis shows that the transducer’s resonant frequency has a detectable reverse influence on the voltage-controlled oscillator (VCO) DC supply current. The force influencing the transducer is determined by the DC supply current ripple position during the VCO frequency sweep. The study presents the method proposal and mathematical analysis, as well as its function verification by simulation and prototype measurements. The proposed principle was validated on a CCMB prototype capable of measuring forces up to ∼2.5 N at a sampling frequency of ∼23 kHz, while the measured time-delay ranges from 14.5 µs to 27.4 µs.

show abstract

“…The interval

depends on force applied to the transducer as follows:

where

MHz is the maximal

output frequency,

MHz is the minimal

output frequency,

is the vacuum permittivity,

is the relative permittivity, S is the surface of the capacitor plates,

is a mechanical constant describing the change in the distance between the plates of the capacitor depending on the force applied to the transducer,

is the distance between the capacitor plates with no force applied, L is the coil inductance of the transducer, and F is the applied force to the transducer. A closer analysis is in [ 10 ].

…”

Section: Measurement and Experimental Resultsmentioning

confidence: 99%

supply current measurement presented in this study is compared to results in [ 10 ] in Figure 18 a,b.…”

Section: Measurement and Experimental Resultsmentioning

confidence: 99%