MEMS sensors for mm-range displacement measurements with sub-nm resolution

Stavrov, Vladimir; Todorov, Vencislav; Shulev, Assen; Hardalov, Chavdar

doi:10.1117/12.2017381

Cited by 6 publications

(4 citation statements)

References 2 publications

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“…Respectively, three electrical signals with (sub)ppm-accuracy in response to the position change of the single actuated part are to be measured. It has been shown elsewhere [8] that the piezoresistive sensors with above described layouts provide signals with a very high linearity, including the crosstalk. That is why, each sensor signal can be represented as a linear function of the Cartesian coordinates.…”

Section: Theory Of Operation For the Position Microsensorsmentioning

confidence: 96%

Piezoresistive position microsensors with ppm-accuracy

Stavrov¹,

Shulev²,

Stavreva³

et al. 2015

SPIE Proceedings

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In this article, the relation between position accuracy and the number of simultaneously measured values, such as coordinates, has been analyzed. Based on this, a conceptual layout of MEMS devices (microsensors) for multidimensional position monitoring comprising a single anchored and a single actuated part has been developed. Both parts are connected with a plurality of micromechanical flexures, and each flexure includes position detecting cantilevers.Microsensors having detecting cantilevers oriented in X and Y direction have been designed and prototyped. Experimentally measured results at characterization of 1D, 2D and 3D position microsensors are reported as well. Exploiting different flexure layouts, a travel range between 50µm and 1.8mm and sensors' sensitivity in the range between 30µV/µm and 5mV/µm@ 1V DC supply voltage have been demonstrated.A method for accurate calculation of all three Cartesian coordinates, based on measurement of at least three microsensors' signals has also been described. The analyses of experimental results prove the capability of position monitoring with ppm-(part per million) accuracy.The technology for fabrication of MEMS devices with sidewall embedded piezoresistors removes restrictions in strong improvement of their usability for position sensing with a high accuracy. The present study is, also a part of a common strategy for developing a novel MEMS-based platform for simultaneous accurate measurement of various physical values when they are transduced to a change of position.

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Section: Theory Of Operation For the Position Microsensorsmentioning

confidence: 96%

Piezoresistive position microsensors with ppm-accuracy

Stavrov¹,

Shulev²,

Stavreva³

et al. 2015

SPIE Proceedings

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“…The presented piezoresistive MEMS strain sensor is based on recently developed sidewalldoped piezo-resistive strain sensors with mechanical deamplification for extended ranges 25 . Figure 1(a) illustrates the layout of one of the position sensors with 500 µm range of motion; It comprises an outer frame and two compliant cantilevers with sidewall piezoresistors.…”

Section: Experimental Setup and Controller Implementation 21 Sidewalmentioning

confidence: 99%

“…This added mass is an especially severe problem for highspeed AFMs, since the moving mass determines to a large extent the structural resonances and therefore the maximum achievable scan speed [25]. In this work, we present a small, lightweight and batch-fabricated micro-electro-mechanical system (MEMS) position sensor [26] implemented in closedloop configuration in a standard as well as a high-speed AFM. This MEMS sensor uses mechanical deamplification flexures to adapt the sensor dynamic range to the scan-range of the scanner.…”

Section: Introductionmentioning

confidence: 99%

A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy

Hosseini¹,

Nievergelt²,

Adams³

et al. 2016

Nanotechnology

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The accuracy and repeatability of atomic force microscopy (AFM) imaging significantly depend on the accuracy of the piezoactuator. However, nonlinear properties of piezoactuators can distort the image, necessitating sensor-based closed-loop actuators to achieve high accuracy AFM imaging. The advent of high-speed AFM has made the requirements on the position sensors in such a system even more stringent, requiring higher bandwidths and lower sensor mass than traditional sensors can provide. In this paper, we demonstrate a way for high-speed, high-precision closed-loop AFM nanopositioning using a novel, miniaturized micro-electro-mechanical system position sensor in conjunction with a simple PID controller. The sensor was developed to respond to the need for small, lightweight, high-bandwidth, long-range and sub-nm-resolution position measurements in high-speed AFM applications. We demonstrate the use of this sensor for closed-loop operation of conventional as well as high-speed AFM operation to provide distortion-free images. The presented implementation of this closed-loop approach allows for positioning precision down to 2.1 Å, reduces the integral nonlinearity to below 0.2%, and allows for accurate closed loop imaging at line rates up to 300 Hz.

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“…MEMS position sensor for detection of 500 µm range displacement MEMS position sensor is chosen for displacement detection in the scanning system. Particularly, a contact MEMS device with a travel range of 500 µm has been used for displacement detection [18]. The envisaged position micro-sensor comprises of a single anchored (1) and a single moveable (2) part.…”

Section: Introductionmentioning

confidence: 99%

Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors

Stavrov¹,

Chakarov²,

Shulev³

et al. 2016

Journal of Theoretical and Applied Mechanics

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Abstract. In this paper, a study of a mechatronic scanning system for application in the microbiology, microelectronics research, chemistry, etc. is presented. Integrated silicon micro electro mechanical system (MEMS) position sensor is used for monitoring the displacement of the scanning system. The utilized silicon MEMS sensors with sidewall embedded piezoresistors possess a number of key advantages such as high sensitivity, low noise and extremely low temperature dependence. Design of 2D scanning system with a travel range of 22 × 22 µm 2 has been presented in present work. This system includes a Compliant Transmission Mechanism, (CTM) designed as a complex elastic mechanism, comprising four parallelograms. Computer aided desigh (CAD) model and finite element analysis (FEA) of the Compliant Transmission Mechanism mechanisms have been carried out. A prototype of the scanning system is fabricated, based on CAD model. An experimental set-up of an optical system and a correlation technique for digital image processing have been used for testing the scanning system prototype. Results of the experimental investigations of the prototyped scanning system are also presented.

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MEMS sensors for mm-range displacement measurements with sub-nm resolution

Cited by 6 publications

References 2 publications

Piezoresistive position microsensors with ppm-accuracy

Piezoresistive position microsensors with ppm-accuracy

A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy

Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors

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