“…As a consequence, it is not only expensive for the assembly but also susceptible to the alignment error that would deteriorate its sensing accuracy. In previous research [7], the author proposed a novel "coplanar" gyro-free IMU design, in which all the employed accelerometers, in-plane sensing accelerometers and out-of-plane sensing accelerometers, are situated on the same facet of the measurement unit. Current MEMS technology developments [8,9] show that it is possible to simultaneously fabricate the in-plane and out-of-plane sensing accelerometers on a substrate.…”