MEMS Surface Acoustic Wave Resonator Based on AlN/Si/Fe–Co–Si–B Structure for Magnetic Field Sensing

Huang, Fei; Zhang, Wenxu; Li, Ling; Sun, Zhaofeng; Yang, Yuntao; Chen, Ruichao; Peng, Bin; Zhang, Wanli

doi:10.1109/jsen.2022.3214183

Cited by 4 publications

(1 citation statement)

References 42 publications

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“…In the model, the series motional branch, consisting of the motional resistance (Rm), capacitance (Cm), and inductance (Lm), describes the mechanical resonance. C0, R0, and Rs generally represent the static capacitance between the IDT fingers, parasitic resistance of materials, and resistance from electrodes and contact pads, respectively [27]. Figure 9a,b also showed the fitting admittance curves of the MBVD model.…”

Section: Resultsmentioning

confidence: 99%

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

Huang

Shuai

et al. 2023

Electronics

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This paper reports an LNO surface acoustic wave (SAW) resonator based on a shear horizontal mode with high operating frequency over 3 GHz, large electromechanical coupling of 33.54%, Q factor of 380, and a relatively good figure of merit (FOM) of 127. Combing crystal-ion-slicing (CIS) technology with a room temperature bonding method, a 4-inch single crystalline LNO thin film on silicon is prepared successfully. The influence of damaged LNO film on crystalline quality and SAW performance is comprehensively analyzed. After totally removing the damaged layer, the electromechanical coupling and Q factor is significantly improved. The high-performance SAW resonator possesses the potential to meet the requirements of SAW filters for the fifth-generation (5G) communication in terms of high frequency, large bandwidth, and a high-quality factor.

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Section: Resultsmentioning

confidence: 99%

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

Huang

Shuai

et al. 2023

Electronics

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Fabrication of NdFeB micromagnets based on vacuum negative pressure injection

Liu,

Wen,

et al. 2024

AIP Advances

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Micromagnets integrated into microelectromechanical systems devices are widely used in the fields of micro-energy harvesters, micro-actuators, and speakers. A novel method for fabricating NdFeB micromagnets based on vacuum negative pressure injection is presented. The influence of array element shape, size, and injection channel on the surface magnetic field was studied by Maxwell finite element analysis. A circle array of 600 µm diameter and 150 µm spacing could generate a stronger magnetic field at the edge of the magnet array. Micron-sized magnetic powders with a diameter of 5 µm mixed with the SU8 T2010 photoresist were filled into the microcavity on a PDMS (polydimethylsiloxane) elastomer, which was prepared by the SU8 positive membrane. The PDMS elastomer was bonded to the glass substrate and degassed by a vacuum pump to form negative pressure for rapid injection and uniform filling. By selecting a suitable binder and optimizing the mixing ratio of the magnetic powder, a 165 µm thick micromagnet with homogeneous dispersion of magnetic powder particles was achieved, and the weight percentage of magnetic powder in the SU8 photoresist was 41.8%. The remanent magnetization of micromagnets was 42 emu/g, the coercivity was 6895 Oe, and the maximum surface magnetic field strength was 1.3 mT after magnetization in a 2 T uniform magnetic field. Finally, the micromagnet array was utilized in a cantilever beam micro-actuator, which could drive the cantilever beam and exhibit an excellent linearity.

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Advancements in One-Port Surface Acoustic Wave (SAW) Resonators for Sensing Applications: A Review

Kent,

Ramakrishnan,

Pratama Kesuma

2024

IEEE Sensors J.

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MEMS Surface Acoustic Wave Resonator Based on AlN/Si/Fe–Co–Si–B Structure for Magnetic Field Sensing

Cited by 4 publications

References 42 publications

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

Fabrication of NdFeB micromagnets based on vacuum negative pressure injection

Advancements in One-Port Surface Acoustic Wave (SAW) Resonators for Sensing Applications: A Review

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