2024
DOI: 10.3390/mi15050556
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MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,
Saurabh Agarwal

Abstract: Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and re… Show more

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References 157 publications
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