2024
DOI: 10.1051/e3sconf/202452904013
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MEMS Technology in the Evolution of Structural Control Strategies

C.S.L. Vijaya Durga,
Anandhi R J,
Navdeep Singh
et al.

Abstract: The integration of Micro-Electro-Mechanical Systems (MEMS) into structural control strategies represents a transformative step towards more efficient, precise, and resilient engineering applications. This paper reviews the evolution and current state of MEMS technology in the context of structural control, highlighting key fabrication techniques such as wet and dry etching, sacrificial layer technology, and advanced additive manufacturing (AM). We delve into the unique properties and advantages brought by MEMS… Show more

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