MEMS Vaporazing Liquid Microthruster: A Comprehensive Review

Fontanarosa, Donato; Francioso, Luca; Giorgi, Maria Grazia De; Vetrano, Maria Rosaria

doi:10.3390/app11198954

Cited by 5 publications

(2 citation statements)

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“…Micro-electromechanical systems (MEMS) have been evolving since MEMS-based inertial sensors were widely used in commercial and military applications such as human motion tracking, navigation systems, and posture control systems [ 1 , 2 , 3 , 4 ]. Features such as tiny size, cost, and low energy consumption make them very attractive.…”

Section: Introductionmentioning

confidence: 99%

Thermal Calibration of Triaxial Accelerometer for Tilt Measurement

Yuan

Tang

Zhang

et al. 2023

Sensors

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The application of MEMS accelerometers used to measure inclination is constrained by their temperature dependence, and each accelerometer needs to be calibrated individually to increase stability and accuracy. This paper presents a calibration and thermal compensation method for triaxial accelerometers that aims to minimize cost and processing time while maintaining high accuracy. First, the number of positions to perform the calibration procedure is optimized based on the Levenberg-Marquardt algorithm, and then, based on this optimized calibration number, thermal compensation is performed based on the least squares method, which is necessary for environments with large temperature variations, since calibration parameters change at different temperatures. The calibration procedures and algorithms were experimentally validated on marketed accelerometers. Based on the optimized calibration method, the calibrated results achieved nearly 100 times improvement. Thermal drift calibration experiments on the triaxial accelerometer show that the thermal compensation scheme in this paper can effectively reduce drift in the temperature range of −40 °C to 60 °C. The temperature drifts of x- and y-axes are reduced from −13.2 and 11.8 mg to −0.9 and −1.1 mg, respectively. The z-axis temperature drift is reduced from −17.9 to 1.8 mg. We have conducted various experiments on the proposed calibration method and demonstrated its capacity to calibrate the sensor frame error model (SFEM) parameters. This research proposes a new low-cost and efficient strategy for increasing the practical applicability of triaxial accelerometers.

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Section: Introductionmentioning

confidence: 99%

Thermal Calibration of Triaxial Accelerometer for Tilt Measurement

Yuan

Tang

Zhang

et al. 2023

Sensors

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“…To effectively control the spatial thermal distribution of ever-increasing power densities in novel micro-and nano-electromechanical systems (MEMS/NEMS) and devices, more accurate temperature monitoring is needed [1][2][3]. For example, elevated channel temperatures present in novel high-electron-mobility transistors (HEMTs) can potentially cause malfunctions of the vital internal components [4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

Spatially Resolved Temperature Distribution in a Rare-Earth-Doped Transparent Glass-Ceramic

Sedmak

Podlipec

Urbančič

et al. 2022

Sensors

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Knowing the temperature distribution within the conducting walls of various multilayer-type materials is crucial for a better understanding of heat-transfer processes. This applies to many engineering fields, good examples being photovoltaics and microelectronics. In this work we present a novel fluorescence technique that makes possible the non-invasive imaging of local temperature distributions within a transparent, temperature-sensitive, co-doped Er:GPF1Yb0.5Er glass-ceramic with micrometer spatial resolution. The thermal imaging was performed with a high-resolution fluorescence microscopy system, measuring different focal planes along the z-axis. This ultimately enabled a precise axial reconstruction of the temperature distribution across a 500-µm-thick glass-ceramic sample. The experimental measurements showed good agreement with computer-modeled heat simulations and suggest that the technique could be adopted for the spatial analyses of local thermal processes within optically transparent materials. For instance, the technique could be used to measure the temperature distribution of intermediate, transparent layers of novel ultra-high-efficiency solar cells at the micron and sub-micron levels.

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