Mercury-lamps array-panel for the annealing of poly-Si thin films

Lim, Hyun-Kyo; Cho, Yunhee; Jeong, Jong‐Mun; Kim, Jung-Hyun; Kim, Hyun-Chul; Han, Sungjun; Kwon, Gi-Chung; Choi, Eun‐Ha; Cho, Guangsup

doi:10.1109/plasma.2010.5534006

2010 Abstracts IEEE International Conference on Plasma Science 2010

DOI: 10.1109/plasma.2010.5534006

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Mercury-lamps array-panel for the annealing of poly-Si thin films

Hyun-Kyo Lim

Yunhee Cho

Jong‐Mun Jeong

et al.

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Mercury-lamps array-panel for the annealing of poly-Si thin films

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