Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever

Rogers, Bill; Manning, M. Lisa; Jones, Matthew R.; Sulchek, Todd; Murray, Kathleen; Beneschott, B.; Adams, Jonathan D.; Hu, Zhiyu; Thundat, Thomas; Cavazos, H.; Minne, S. C.

doi:10.1063/1.1614876

Cited by 95 publications

(52 citation statements)

References 24 publications

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“…Some recent developments are reviewed in [53][54][55][56][57][58]. Major topics published include the following studies: the fabrication of silicon piezoresistive [59,60] or polymer [61] cantilevers, detection of vapors and volatile compounds, e.g., mercury vapor [62], HF vapor [63,64], chemical vapors [65], as well as the development of gas sensors based on the piezoresistive concept [66]. Pdbased sensors for hydrogen [67], deuterium and tritium [68] are reported, as well as sensors taking advantage of the sensing properties of hydrogels [69] or zeolites [70].…”

Section: Recent Literature and Outlookmentioning

confidence: 99%

Microcantilever Sensors

Lang¹,

Gerber²

2008

Topics in Current Chemistry

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Microfabricated cantilevers have been used in atomic force microscopy for the topography imagingof non-conductive surfaces for more than 20 years. Cantilever beams without tips have proved theirapplicability in recent years as miniaturized, ultrasensitive, and fast-responding sensors for applicationsin chemistry, physics, biochemistry, and medicine. Microcantilever sensors respond by bending dueto the absorption of molecules. A shift in resonance frequency also occurs. They can be operatedin different environments such as gaseous environment, liquids, or vacuum. In gas, microcantileversensors can be operated as an artificial nose, whereby the bending pattern of a microfabricatedarray of eight polymer-coated silicon cantilevers is characteristic of the different vapors from solvents,flavors, and beverages. When operated in a liquid, microcantilever sensors are able to detectbiochemical reactions. Each cantilever is functionalized with a specific biochemical probe receptor,sensitive for detection of the corresponding target molecule. Applications lie in the fields of label-and amplification-free detection of DNA hybridization, the detection of proteins as well as antigen-antibodyreactions, and the detection of larger entities, such as bacteria and fungi.

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Section: Recent Literature and Outlookmentioning

confidence: 99%

Microcantilever Sensors

Lang¹,

Gerber²

2008

Topics in Current Chemistry

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“…[1][2][3][4][5][6][7][8][9][10][11] Masses in the range of picograms and femtograms have been detected using these devices, with projected detection limits on the order of attograms. [11][12][13] While dynamically driven microcantilever chemical sensors are well suited for gas-phase detection, [1][2][3][5][6][7][8][9][10][11][14][15][16][17][18][19][20][21] their usefulness as a sensing platform is limited when operating in viscous liquid media. 7,[22][23][24][25][26][27][28][29] Due to the additional fluid resistance (combined effects of fluidrelated inertial and viscous forces), the beam's resonant frequency, f res , and quality factor, Q, will drastically decrease when the operating medium is changed from air to liquid; 22,28,[30][31][32] these decreases are due to the increases in the f...…”

Section: Introductionmentioning

confidence: 98%

Characteristics of laterally vibrating resonant microcantilevers in viscous liquid media

Cox

Josse

Heinrich

et al. 2012

Journal of Applied Physics

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The characteristics of microcantilevers vibrating laterally in viscous liquid media are investigated and compared to those of similar microcantilevers vibrating in the out-of-plane direction. The hydrodynamic loading on the vibrating beam is first determined using a numerical model. A semi-analytical expression for the hydrodynamic forces in terms of the Reynolds number and the aspect ratio (beam thickness over beam width) is obtained by introducing a correction factor to Stokes' solution for a vibrating plate of infinite area to account for the effects of the thickness. The results enable the effects of fluid damping and effective fluid mass on the resonant frequency and the quality factor (Q) to be investigated as a function of both the beam's geometry and liquid medium's properties and compared to experimentally determined values given in the literature. The resonant frequency and Q are found to be higher for laterally vibrating microcantilevers compared to those of similar geometry experiencing transverse (out-of-plane) vibration. Compared to transversely vibrating beams, the resonant frequency of laterally vibrating beams is shown to decrease at a slower rate (with respect to changes in viscosity) in media having higher viscosities than water. The theoretical results are compared to experimental data obtained for cantilevers completely immersed in solutions of varying aqueous percent glycerol. The increases in resonant frequency and Q are expected to yield much lower limits of detection in liquid-phase chemical sensing applications.

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“…Microcantilever sensors have been extensively used for physical [1], chemical [2][3][4][5][6][7][8][9][10][11], and biological [1,[12][13][14][15][16] detection. A cantilever sensor deflects due to physically or chemically induced surface stress.…”

Section: Introductionmentioning

confidence: 99%

Interferometric measurement using bimorph actuated staggered mirror (BASM) microsensor

Lim

Yim

2008

J Mech Sci Technol

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For physical and chemical sensing applications, a bimorph actuated staggered mirror (BASM) microsensor was designed and fabricated by surface micromachining using a transparent quartz substrate. While the conventional cantilever sensors have angular deflection, BASM's moving mirror performs piston-type pure vertical motion in response to environmental stimuli like temperature change and surface stress change due to molecular adsorption. Since the sensor itself has a fixed or reference mirror as well as a moving mirror, 1) an interferometric measurement is possible without an additional reference mirror in off-axis measurement setup, and 2) vibration measurement noise can be reduced. For preliminary test purposes, interferometric measurement using an optical setup was performed for temperature change. At He-Ne line (632.8 nm), a temperature change of ~0.8 K caused a minimum-to-maximum interferometric light intensity change which corresponds to ~144 nm shift of the moving mirror part. An optical diffraction analysis was performed and optimal device parameters were found to maximize the sensor sensitivity.

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Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever

Cited by 95 publications

References 24 publications

Microcantilever Sensors

Microcantilever Sensors

Characteristics of laterally vibrating resonant microcantilevers in viscous liquid media

Interferometric measurement using bimorph actuated staggered mirror (BASM) microsensor

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