The new complex yttrium benzoylpivaloylmethanide and its
acetonitrile adduct have been
characterized by IR, NMR, mass spectroscopy, X-ray structure analysis,
and thermogravimetric/differential thermal analysis. In situ flux measurements and
mass spectroscopic
studies have been performed to test the suitability of this compound as
a precursor for the
deposition of complex oxide thin films under molecular beam conditions.
Finally it has been
used to deposit epitaxial Y2O3 (001) thin films
on SrTiO3 (001) substrates.