Metal–organic chemical vapour deposition of YBCO using a new, stable and volatile barium precursor

Shamlian, Sarkis H.; Hitchman, Michael L.; Cook, Stephen L.; Richards, Barbara C.

doi:10.1039/jm9940400081

Cited by 41 publications

(14 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For barium, however, no such stable volatile precursor was available [ I ] until recently. Now several have been reported [2-51, o n e of which is [Ba(TDFND)2.tetraglyme] [3,4] (where T D F N D = 1,1,1,2,2,3,3,7,7,8,8,9,9,5)-tetradecafluorononane-4,6-dione).…”

Section: Introductionmentioning

confidence: 99%

A study by In Situ FTIR Spectroscopy of the Decomposition of Precursors for the MOCVD of High Temperature Superconductors

et al. 1995

View full text Add to dashboard Cite

In this paper we report on a study by FTIR spectroscopy of the gas phase thermal decomposition of p(TMHD) 31, [Cu(TMHD)2] and [Ba(TDFND)2.tetraglyme] under a total pressure of I0 Torr, for a temperature range 200 -650°C, and in the absence and presence of oxygen. nie variation of the decomposition characteristics for each of the complexes as a function of temperature, and as shown by changes in the absorption coefficients, are related to the molecular structures.

show abstract

Section: Introductionmentioning

confidence: 99%

A study by In Situ FTIR Spectroscopy of the Decomposition of Precursors for the MOCVD of High Temperature Superconductors

et al. 1995

View full text Add to dashboard Cite

show abstract

“…This approach has been successfully used by Shamlian et al [28] In particular, they developed a new low melting point precursor, [Ba(tdfnd) 2 (tetraglyme)] (IV) (Htdfnd ¼ 1,1,1,2,2,3,3,7,7,8,8,9,9,9-tetradecafluorononane-4,6-dione), which also has been independently synthesized and used in the MOCVD process by Malandrino et al [29] The mixed-ligand complex IV melts at 70 8C and can be completely evaporated at 90-120 8C under low pressure. [29,30] The crystal structure of IV was solved by Nash et al, [30] who supposed that low melting point compound IV offers better stability and volatility than compound III due to the special role of the n-C 3 F 7 group in reducing the strength of intermolecular F-H interactions between tetraglyme and fluorinated substituents of neighboring molecules.…”

Section: Synthesis and Characterization Of New Barium And Strontium Pmentioning

confidence: 93%

Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium‐Strontium‐Titanate Films

Kuzmina¹,

Малкерова²,

Alikhanyan³

et al. 2009

Chemical Vapor Deposition

View full text Add to dashboard Cite

Novel barium and strontium precursors, belonging to the family of volatile complexes of the alkaline earth element (AEE) fluorinated b-diketonates with polyglymes, [M(dfhd) 2 (tetraglyme)] [Hdfnd ¼ 1,1,1,2,2,6,6,7,7,7-dekafluoro-heptane-3,5-dione, M ¼ Ba (I), Sr (II)], are synthesized and tested with an aim to use them for metal-organic (MO)CVD of Ba x Sr 1-x TiO 3 (BST) thin films. The thermal behavior and composition of vapor phases for compounds I and II are studied by thermal analysis and mass spectrometry (MS). Considerable reduction of the melting point (down to 80-90 8C) for both compounds I and II, as compared to known volatile complexes, is achieved. By means of the developed precursors, epitaxial BST films (x ¼ 0.5) are grown on SrTiO 3 substrates by using the modified MOCVD facility. The quality of the grown films is examined by high-resolution (HR) X-ray diffraction (XRD) and high-resolution (HR) scanning electron microscopy (SEM).

show abstract

“…MOCVD precursors which are liquid at the temperature of use would thus offer greater filmgrowth efficiency and vapor pressure stability. 14,15 Moreover, some precursors are unstable at high temperature over long periods of time. The quest for more stable and more volatile barium oxide precursors needed for ferroelectrics or high-T c superconductors is an example of the challenges in precursor chemistry in order to ensure reproducibility of the deposits, scale-up and thus industrial applications.…”

Section: General Considerationsmentioning

confidence: 99%

Trends in precursor design for conventional and aerosol-assisted CVD of high-Tc superconductors

Hubert‐Pfalzgraf

Guillon

1998

Appl. Organometal. Chem.

View full text Add to dashboard Cite

Conventional MOCVD techniques require molecules displaying volatility and constant vapor pressure. Metal oxide precursors, i.e., β‐diketonates, or classical or functionalized metal alkoxides are mostly solids. The various approaches used to tailor volatility are discussed with barium derivatives as an example. The relationships between sublimation temperature and molecular weight suggest that volatility can be optimized on the basis of molecular weight. Aerosol‐assisted CVD (AACVD) can use a larger range of precursors since volatility is no longer crucial. The solvent is an undesired ballast in a CVD process. High solubility of the precursors in the selected solvent is thus desirable. ‘Stability’ here includes the absence of precipitation which would change the stoichiometry of the feed solution for multicomponent oxides. Precipitation is often promoted by hydrolysis; stability toward moisture is thus desirable. The use of mixtures of precursors based on different ligands (β‐diketonates, β‐ketoesterates, alkoxides) can lead to ligand exchange reactions giving homometallic species, sometimes of low solubility, or mixed‐metal species by self‐assembly, thus improving solubility and stability toward moisture. These aspects are illustrated in compositions related to high‐Tc superconductors. Novel copper, yttrium, cerum(IV), barium‐copper, yttrium‐copper and praseodynium‐copper species are reported. © 1998 John Wiley & Sons, Ltd.

show abstract

Metal–organic chemical vapour deposition of YBCO using a new, stable and volatile barium precursor

Cited by 41 publications

References 9 publications

A study by In Situ FTIR Spectroscopy of the Decomposition of Precursors for the MOCVD of High Temperature Superconductors

A study by In Situ FTIR Spectroscopy of the Decomposition of Precursors for the MOCVD of High Temperature Superconductors

Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium‐Strontium‐Titanate Films

Trends in precursor design for conventional and aerosol-assisted CVD of high-Tc superconductors

Contact Info

Product

Resources

About