2010
DOI: 10.1021/nn1019253
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Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications

Abstract: The fabrication of gold nanodots by stencil lithography and its application for optical biosensing based on localized surface plasmon resonance are presented. Arrays of 50-200 nm wide nanodots with different spacing of 50-300 nm are fabricated without any resist, etching, or lift-off process. The dimensions and morphology of the nanodots were characterized by scanning electron and atomic force microscopy. The fabricated nanodots showed localized surface plasmon resonance in their extinction spectra in the visi… Show more

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Cited by 93 publications
(89 citation statements)
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“…These attractive properties of the SPs have found application in a wide variety of fields, that is from medical applications, such as bio-sensing 4 and cancer therapy 5 , to plasmonic waveguiding 6 . However, the experimental mapping of SPs on the nanoscale using light remains an inherently difficult task owing to the diffraction limit.…”
mentioning
confidence: 99%
“…These attractive properties of the SPs have found application in a wide variety of fields, that is from medical applications, such as bio-sensing 4 and cancer therapy 5 , to plasmonic waveguiding 6 . However, the experimental mapping of SPs on the nanoscale using light remains an inherently difficult task owing to the diffraction limit.…”
mentioning
confidence: 99%
“…Over the past few years, significant advances in nanostencil lithography have enabled the routine fabrication of ~200 nm feature sizes 6 . However, the inability of nanostencil lithography to fabricate features with nanometer precision has significantly limited its utility.…”
mentioning
confidence: 99%
“…3a,b). However, small gold particles, attributed to surface diffusion of gold following deposition, are visible 6,33 . If needed, previous reports have demonstrated the ability to selectively remove these smaller gold particles with a short dry etch 34 .…”
mentioning
confidence: 99%
“…SPPs have played a significant role in numerous areas, ranging from spectroscopy [3], biomedical sensing [4], photovoltaics [5], to integrated optical devices [6,7]. Because of highly confined and enhanced field, SPPs have been considered as a promising candidate for ultrahigh compact and ultrafast information processing.…”
Section: Introductionmentioning
confidence: 99%