Metalorganic chemical vapor deposition and characterization of ZnO materials

Abstract

Zinc oxide is attracting growing interest for potential applications in electronics, optoelectronics, photonics, and chemical and biochemical sensing, among other applications. We report herein our efforts in the growth and characterization of p-and n-type ZnO materials by metalorganic chemical vapor deposition (MOCVD), focusing on recent nitrogen-doped films grown using diethyl zinc as the zinc precursor and nitric oxide (NO) as the dopant. Characterization results, including resistivity, Hall measurements, photoluminescence, and SIMS, are reported and discussed. Electrical behavior was observed to be dependent on illumination, atmosphere, and heat treatment, especially for p-type material.

Low‐Temperature‐Grown Transition Metal Oxide Based Storage Materials and Oxide Transistors for High‐Density Non‐volatile Memory

“…stacked memory because they do not require high-temperature processes. However, it is difficult to alter the conductivity type of most oxide semiconductors, [24] therefore, heterojunction diodes composed of two different materials are the preferred method of diode fabrication. CuO is a well-known p-type semiconductor, [25] while IZO is an n-type semiconductor.…”

High‐Current‐Density CuO x/InZnOx Thin‐Film Diodes for Cross‐Point Memory Applications

“…Because it is generally difficult to alter the conductivity type of oxides, [10] the most easily constructible oxide diodes are the heterojunctions composed of two different materials with different bandgap energies. Considering that the majority carriers of the wider-bandgap material become more influential owing to the different built-in potentials for holes and electrons in heterojunctions, the diode current density is expressed, for example for electron-dominated junctions, by the Shockley equation as…”

Chemical kinetics and mass transport effects in solution-based selective-area growth of ZnO nanorods

“…ZnO nanostructures are often synthesized by vapor processes, such as thermal evaporation from a solid zinc oxide source [4,5], metal-organic chemical vapor deposition (MOCVD) [6,7], or by a vapor-liquid-solid (VLS) technique employing a metal catalyst [8,9]. There is much current work to control the synthesis and properties (such as size, placement, and alignment) of ZnO nanostructures.…”