2015
DOI: 10.1109/tthz.2015.2463673
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Metamaterial-Based Terahertz Imaging

Abstract: Abstract-This article presents the design of an innovative, low-cost, uncooled, metamaterial based terahertz (THz) focal plane array (FPA). A single pixel is composed of a resonant metamaterial absorber and micro-bolometer sensor integrated in a standard 180 nm CMOS process. The metamaterial is made directly in the metallic and insulating layers available in the six metal layer CMOS foundry process. THz absorption is determined by the geometry of the metamaterial absorber which can be customized for different … Show more

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Cited by 52 publications
(31 citation statements)
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“…For nanophotonic elements integration to IS, there have been several methods, such as physical attachment, [ 72 ] post-CMOS process, [73][74][75] back-end-of-line CMOS process. [76][77][78]88,89,94,95 ] Results of both photocurrent measurement and real imaging process prove the functions. Although the former two are achievable in laboratory research, the later one is a practical way.…”
Section: Discussionmentioning
confidence: 90%
See 1 more Smart Citation
“…For nanophotonic elements integration to IS, there have been several methods, such as physical attachment, [ 72 ] post-CMOS process, [73][74][75] back-end-of-line CMOS process. [76][77][78]88,89,94,95 ] Results of both photocurrent measurement and real imaging process prove the functions. Although the former two are achievable in laboratory research, the later one is a practical way.…”
Section: Discussionmentioning
confidence: 90%
“…A minimum NEP of 37 pW Hz –1/2 and a thermal time constant of 68 ms was achieved. In 2015, they extended this single pixel sensor to a 5 × 5 pixel array with a pixel size of 30 μm × 30 μm . As shown in Figure a, the metamaterial was made directly in the metallic and insulating layers available in the six metal layer CMOS foundry process.…”
Section: Other Nanophotonic Issmentioning
confidence: 99%
“…R&S structures have been the subject of intensive invest igation for aerospace/ defence related applications (Baskey et al 2017). This rapid progress in the field of R&S technology has explored high performance composite structures like curved, multilayered, frequency selective surface (FSS) impacted and sandwiched R&S structures (Varadan et al 2010, Carranza et al 2015, Yang et al 2016b, Baskey et al 2017, Szabo 2017. However, it is quite difficult to measure the performance of such heterogeneous structures due to their design complexities.…”
Section: Introductionmentioning
confidence: 99%
“…The periodic nature of MM absorbers lends itself to coupling with micro-bolometer sensing elements to form a focal plane array (FPA). MM based FPAs have been developed in both the S band (2-4 GHz) [27] and at THz frequencies (2.5 THz) where the MM absorbers were monolithically integrated into a standard 0.35 μm CMOS process and the vanadium oxide microbolometer sensors deposited on top [30,31].…”
Section: Introductionmentioning
confidence: 99%