2018
DOI: 10.1088/0256-307x/35/5/056101
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Metastable Electron Traps in Modified Silicon-on-Insulator Wafer

Abstract: We perform the total ionizing radiation and electrical stress experiments to investigate the electrical characteristics of the modified silicon-on-insulator (SOI) wafers under different Si ion implantation conditions. It is confirmed that Si implantation into the buried oxide can create deep electron traps with large capture cross section to effectively improve the antiradiation capability of the SOI device. It is first proposed that the metastable electron traps accompanied with Si implantation can be avoided… Show more

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Cited by 2 publications
(1 citation statement)
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“…[1,4] In many studies of TID effect, the characteristics of the front-gate transistor and the characteristics of the back-gate transistor were both analyzed. [4][5][6][7][10][11][12][13][14][15][16][17][18] Hence, both of them were all measured in experiment. In their papers, they only stated that the characteristics of the front-gate transistor and the characteristics of the back-gate transistor were measured before irradiation and after a certain total ionizing dose level.…”
Section: Introductionmentioning
confidence: 99%
“…[1,4] In many studies of TID effect, the characteristics of the front-gate transistor and the characteristics of the back-gate transistor were both analyzed. [4][5][6][7][10][11][12][13][14][15][16][17][18] Hence, both of them were all measured in experiment. In their papers, they only stated that the characteristics of the front-gate transistor and the characteristics of the back-gate transistor were measured before irradiation and after a certain total ionizing dose level.…”
Section: Introductionmentioning
confidence: 99%