Machine learning is an application of artificial intelligence that focuses on the development of computer algorithms which learn automatically by extracting patterns from the data provided. Machine learning techniques can be efficiently used for a problem with a large number of parameters to be optimized and also where it is infeasible to develop an algorithm of specific instructions for performing the task. Here, we combine the finite element simulations and machine learning techniques for the prediction of mode effective indices, power confinement and coupling length of different integrated photonics devices. Initially, we prepare a dataset using COMSOL Multiphysics and then this data is used for training while optimizing various parameters of the machine learning model. Waveguide width, height, operating wavelength, and other device dimensions are varied to record different modal solution parameters. A detailed study has been carried out for a slot waveguide structure to evaluate different machine learning model parameters including number of layers, number of nodes, choice of activation functions, and others. After training, this model is used to predict the outputs for new input device specifications. This method predicts the output for different device parameters faster than direct numerical simulation techniques. Absolute percentage error of less than 5% in predicting an output has been obtained for slot, strip and directional waveguide coupler designs. This study pave the step towards using machine learning based optimization techniques for integrated silicon photonics devices. Index Terms-Machine learning, neural networks, regression, multilayer perceptron, silicon photonics. I. INTRODUCTION M ACHINE learning (ML) technology is being extensively used in many aspects of modern society: web searches, social networking, smartphones, bioinformatics, robotics, chatbots, and self-driving cars [1]. ML techniques are used to classify or detect objects in images, speech to text conversion, pattern recognition, natural language processing, sentiment analysis and recommendations of products/movies for users based on their search preferences. ML algorithms can be trained to perform exceptionally well when it is difficult to analyze the underlying physics and mathematics of the problem [2]. ML algorithms extract patterns from the raw data provided during the training without being explicitly programmed. The learned patterns can be used to make predictions on some other data of interest. ML systems can be trained more efficiently when massive amount of data is present [3], [4]. Recently, research on the application of ML techniques for optical communication systems and nanophotonic devices is