We study the emission properties of an electroluminescent THz frequency quantum cascade structure embedded in an array of patch antenna double-metal microcavities. We show that high photon extraction efficiencies can be obtained by adjusting the active region thickness and array periodicity as well as high Purcell factors (up to 65), leading to an enhanced overall emitted power. Up to a 44-fold increase in power is experimentally observed in comparison with a reference device processed in conventional mesa geometry. Estimation of the Purcell factors using electromagnetic simulations and the theoretical extraction efficiency are in agreement with the observed power enhancement and show that, in these microcavities, the overall enhancement solely depends on the square of the total quality factor. Published by AIP Publishing. The ability to realize efficient sources and detectors at terahertz (THz) frequencies is of importance as this opens the way to a wide range of potential applications in molecular spectroscopy, imaging, security scanning, and in the fundamental studies of low energy chemical and physical processes.1 For optoelectronic devices operating in the THz range, the light-matter interaction can be significantly enhanced by confining the electromagnetic field into highly sub-wavelength metallic structures. Effective volumes as low as 10, where k is the radiation wavelength, have been achieved in passive double-metal micro-cavities comprising a dielectric layer bounded by a metallic back-plane and a patterned top metal layer.2 Similarly, Purcell enhancement of spontaneous emission has been observed in LC microresonators as well as mirror-grating metal cavities 3,4 and microcavity effects for THz quantum cascade lasers have been discussed. 5,6 Double-metal confinement lends itself to the creation of arrays of patch antenna microcavities and has led to the demonstration of the ultra-strong lightmatter coupling regime and the realization of efficient infrared and THz detectors. [7][8][9] In the case of square resonators, the resonant wavelength, k, is set by the length of the square side, s, through the formula s ¼ k/2n eff, where n eff is the effective mode index. This photonic structure is ideal for intersubband (ISB) emitters as the oscillating dipoles of the electronic transition align with the intracavity TM mode polarization. In addition, this geometry behaves as a patch antenna, rotating the polarization of the confined field by 90 when radiating into the far-field. Therefore, one can realize surface emitting photonic devices in which the light-matter interaction can be enhanced by resonantly tuning the energy of the microcavity mode with a radiative ISB transition by adjusting only the geometric parameter s.
10In this letter, we study THz frequency emission from arrays of double-metal patch microcavities containing a quantum cascade (QC) active region. We demonstrate the enhancement of the electroluminescence owing to an efficient out-coupling that is achieved by carefully choosing the thickness of ...