Method for absolute measurement of flat surface

Abstract

Interferometry is a relative measurement method for optical surface testing, and thus its testing accuracy depends on the accuracy of the reference surface. Absolute measurement is one of the most effective methods to improve the testing accuracy in interferometry. We present an efficient absolute measurement method based on Zernike polynomial fitting algorithms. With our proposed method, the profiles of both the test surface and the reference surface can be calculated simultaneously. We further carried out simulation analysis to scientifically evaluate the test accuracy of the proposed method. Finally, we conducted actual experiments to demonstrate the feasibility and practicability of our method.