Method for determining the optical constants of a thin film on a transparent substrate

Abstract

A method has been proposed for exact calculation of the optical parameters n and k of a thin film on a transparent substrate by simultaneously solving the equations for two of the envelopes of the transmission and reflection spectra. The singularity of the solution and the convergency area are proved, and the influence of the inaccuracies in drawing the envelopes upon the errors made during the calculation of n and k is also investigated. The method is most accurate for the envelopes of the transmission minima and the reflection maxima in the region of strong and medium absorption. The accuracy of other methods which use data from the transmission or reflection envelopes has also been investigated. The present method describes correctly the change of n in the region of medium and strong absorption for an amorphous film with composition Ge28As12S60.

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“…The knowledge of two successive couples of maximal values [44][45][46] allows us to calculate the film thickness d:…”

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“…Thickness and optical parameters of the films have been determined by fitting the spectra using the Minkov [1] method and adopting the unified treatment of Forouhi and Bloomer [2] for the dispersion behaviour of the dielectric constant. A fit to the experimental spectrum is also shown in figure 1.…”

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