Method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist

Sidorkin, Vadim; Alkemade, P.F.A.; Salemink, H.W.M.; Schmits, R.; Drift, E. van der

doi:10.1116/1.3263171

Cited by 5 publications

(1 citation statement)

References 7 publications

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“…The radicals diffuse catalyzing redistribution reactions which crosslink neighboring molecules into base-insoluble hydrogenenriched SiO x oligomers. [46][47][48] Ambient conditions are insufficiently inert to completely impede the reactions, 44 resulting in limited shelf life 37 and transient exposure behaviors 38 .…”

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confidence: 99%

Optimization of Quantum-dot Qubit Fabrication via Machine Learning

Mei,

Milosavljevic,

Simpson

et al. 2020

Preprint

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Precise nanofabrication represents a critical challenge to developing semiconductor quantumdot qubits for practical quantum computation. Here, we design and train a convolutional neural network to interpret in-line scanning electron micrographs and quantify qualitative features affecting device functionality. The high-throughput strategy is exemplified by optimizing a model lithographic process within a five-dimensional design space and by demonstrating a new approach to address lithographic proximity effects. The present results emphasize the benefits of machine learning for developing robust processes, shortening development cycles, and enforcing quality control during qubit fabrication.

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mentioning

confidence: 99%

Optimization of Quantum-dot Qubit Fabrication via Machine Learning

Mei,

Milosavljevic,

Simpson

et al. 2020

Preprint

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Geometrically Structured Nanomaterials for Nanosensors, NEMS, and Nanosieves

Seo

Yoo

et al. 2020

Advanced Materials

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Recently, geometrically structured nanomaterials have received great attention due to their unique physical and chemical properties, which originate from the geometric variation in such materials. Indeed, the use of various geometrically structured nanomaterials has been actively reported in enhanced‐performance devices in a wide range of applications. Recent significant progress in the development of geometrically structured nanomaterials and associated devices is summarized. First, a brief introduction of advanced nanofabrication methods that enable the fabrication of various geometrically structured nanomaterials is given, and then the performance enhancements achieved in devices utilizing these nanomaterials, namely, i) physical and gas nanosensors, ii) nanoelectromechanical devices, and iii) nanosieves are described. For the device applications, a systematic summary of their structures, working mechanisms, fabrication methods, and output performance is provided. Particular focus is given to how device performance can be enhanced through the geometric structures of the nanomaterials. Finally, perspectives on the development of novel nanomaterial structures and associated devices are presented.

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