2016
DOI: 10.1116/1.4948527
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Method for measuring thermal accommodation coefficients of gases on thin film surfaces using a MEMS sensor structure

Abstract: A method for measuring the thermal accommodation coefficient α for surface-/gas interfaces is presented. It allows the determination of α for thin films produced by a variety of deposition technologies, such as chemical vapor deposition, physical vapor deposition, and atomic layer deposition (ALD). The setup is based on two microelectromechanical systems (MEMS) Pirani sensors facing each other in a defined positioning. Because these MEMS sensors show a very high sensitivity in their individual molecular flow r… Show more

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Cited by 13 publications
(5 citation statements)
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“…An ideal assumption α = 1 denotes a perfect thermal accommodation. 18 Actually, α is taken as an empirical value based on a specific case. For silica aerogels, it was taken to be between 0.68 and 1.…”
Section: ■ Introductionmentioning
confidence: 99%
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“…An ideal assumption α = 1 denotes a perfect thermal accommodation. 18 Actually, α is taken as an empirical value based on a specific case. For silica aerogels, it was taken to be between 0.68 and 1.…”
Section: ■ Introductionmentioning
confidence: 99%
“…The most popular method is based on the thermal accommodation coefficient (α). An ideal assumption α = 1 denotes a perfect thermal accommodation . Actually, α is taken as an empirical value based on a specific case.…”
Section: Introductionmentioning
confidence: 99%
“…The energy transfer at the gas-surface interface is usually evaluated by the parameter of the thermal accommodation coefficient (TAC) [20], which describes the ensemble behavior of the gas molecules on a solid surface for engineering applications. In typical experimental systems, heat flux is generated from an electrically heated filament to a coaxial cylinder immersed in a bath at a constant temperature [21,22] or between two parallel plates at a controlled temperature [23,24]. Then, the TAC value is calculated using the measured heat flux and temperature distribution, as described by different theoretical models [21,25], such as the low-pressure method (free molecular method) [22,26], the temperature-jump method [27], and the mean free path method [28].…”
Section: Introductionmentioning
confidence: 99%
“…Here, 𝑇 𝑟 is the temperature of reflected gas molecules, 𝑇 𝑖 and 𝑇 𝑠 are incident molecule and structure temperature, respectively. For every combination of a surface material and gas species, there is a unique α, which depends on a variety of factors such as temperature, surface roughness, density and atomic/molecular weight of the surface and the gas, and even electronic properties of the surface [30][31][32][33][34] . If the thermal accommodation coefficient is larger on the bottom surface of a film, the momentum change of the gas molecules and the corresponding recoil of the structure is larger on the bottom side, resulting in a net lift force (Fig.…”
Section: Introductionmentioning
confidence: 99%