2018
DOI: 10.3103/s8756699018040118
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Method of Calibration of a Laser-Based Galvanometric Scanning System with Submicron Resolution

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Cited by 3 publications
(2 citation statements)
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“…In most of the published works [7,[14][15][16][17], the calibration of laser galvanometric scanning systems by calculating correction tables was performed as follows: The laser beam was controlled to desired positions, which were defined by a grid of points. The laser beam engraved a grid of marks on a calibration plate to establish real positions of laser spot.…”
Section: Literature Reviewmentioning
confidence: 99%
See 1 more Smart Citation
“…In most of the published works [7,[14][15][16][17], the calibration of laser galvanometric scanning systems by calculating correction tables was performed as follows: The laser beam was controlled to desired positions, which were defined by a grid of points. The laser beam engraved a grid of marks on a calibration plate to establish real positions of laser spot.…”
Section: Literature Reviewmentioning
confidence: 99%
“…Subsequently, the real positions of laser spot were measured by a measurement system in another location. Finally, based on mathematical models (with assembly defects [7] or without defects [16,17]) and experimental data, the correction tables/matrices were calculated. These methods allow the laser galvanometric scanning heads to be calibrated effectively and precisely.…”
Section: Literature Reviewmentioning
confidence: 99%