Method of preparation of heterogeneous height standards for measurements by means of interferometry

Abstract

The results of the practical implementation of a method for preparing calibration standards based on magnetron sputtering of a chromium film on the surface of the standard are presented. This film is an electrically conductive layer that preserves the topography of relief elements and allows scanning without charge accumulation in the sample. The results obtained showed that the sputtering of thin chromium films on the surface of height standards, the relief elements of which have different reflection coefficients, makes it possible to measure the heights of such standards with a fairly low error.