Method to Fabricate Spiral Phase Plate with Continous Surface by One Exposure Processing

Lifang, 史立芳 Shi; A-xiu, 曹阿秀 Cao; Shuji, 郭书基 Guo; Xue, 罗雪 Luo; Yanyun, 秦燕云 Qin; Qi-ling, 邓启凌 Deng

doi:10.3788/aos201535.s122001

Cited by 1 publication

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“…Currently, the main methods for preparing spiral phase plates are molding, electron beam lithography and laser direct writing. [8][9][10] Molding technique permits the fabrication of high-quality smooth spiral phase plates, but the manufacturing accuracy depends largely on the precision of the mold. E-beam lithography offers extremely high resolution, but requires expensive equipment and complex processing steps that do not facilitate large-area or high-volume processing.…”

Section: Introductionmentioning

confidence: 99%

Fast preparation method for spiral phase plates based on digital grayscale mask

Chen,

Kuang,

Luo

et al. 2024

Advanced Fiber Laser Conference (AFL2023)

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The wide application of spiral phase plate has promoted the rapid development of its production technology. Traditional spiral phase plate fabrication techniques such as electron beam lithography, focused ion beam lithography, laser direct writing have the disadvantages of high cost and low efficiency due to expensive equipment and point-by-point exposure. In this paper, we propose a fast preparation method for spiral phase plates based on digital grayscale mask. The 3D contours of the spiral phase plate are mapped into a grayscale mask by interval quantization, and the criteria for interval quantization are explored in detail. For the continuous spiral phase plate and step spiral phase plate, gray scale continuous digital mask and gray scale step digital mask are designed and used for digital lithography respectively, and the experimental results are tested and analyzed. The results show that spiral phase plates with different topological charges for specific wavelength can be fabricated by controlling the gray-scale digital mask. The fabricated spiral phase plates have smooth surfaces with well-defined edge contours and are capable of initially modulating the laser beam.

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Section: Introductionmentioning

confidence: 99%