“…To this end, we create two MZI EO intensity modulators based on thin‐film BaTiO 3 crystal waveguide with two device samples having different EO coefficient
, namely
= 628 pm V −1 for Sample‐1 and 429 pm V −1 for Sample‐2, for comparison. [
32 ] The corresponding
values of the Sample‐1 and Sample‐2 are −0.0107 and −0.0215, respectively. In order to systematically simulate the performance of the BaTiO 3 thin film MZI‐type intensity EO modulators, certain parameters are set as follows: the initial optical phase difference between the two arms of the MZI structure is 0, the thickness of the BaTiO 3 film T f is 0.45 µm, the width of the rib‐waveguide W is 4 µm, the height of the rib‐waveguide H is 0.1 µm, the electrode embedded depth
is 0.1 µm, and the four electrode gaps of
= 5, 6, 7, and 8 µm are considered.…”