2020
DOI: 10.1016/j.mee.2020.111232
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Methodology for the characterization and observation of filamentary spots in HfOx-based memristor devices

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Cited by 23 publications
(12 citation statements)
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“…Each memristor consists of a metal/insulator/metal structure in which the conductance of the insulator can be set to different values by applying electrical stresses. [16][17][18] In this type of device, the conductance change is driven by the formation and disruption of a conductive nanofilament across the insulating film, [19][20][21][22][23][24] and in many cases the disruption of the filament (and therefore the reset event) is a thermal effect. [25,26] Therefore, studying the temperature of the memristor with a high lateral resolution (below 100 nm) is very important to understand the functioning of these devices.…”
Section: Resultsmentioning
confidence: 99%
“…Each memristor consists of a metal/insulator/metal structure in which the conductance of the insulator can be set to different values by applying electrical stresses. [16][17][18] In this type of device, the conductance change is driven by the formation and disruption of a conductive nanofilament across the insulating film, [19][20][21][22][23][24] and in many cases the disruption of the filament (and therefore the reset event) is a thermal effect. [25,26] Therefore, studying the temperature of the memristor with a high lateral resolution (below 100 nm) is very important to understand the functioning of these devices.…”
Section: Resultsmentioning
confidence: 99%
“…The top metal electrode consists of a (200 nm TiN/10 nm Ti) bi-layer and the 50 nm-thick W bottom electrode was deposited on a 20 nm-thick Ti layer adherence layer on the silicon substrate. The electrical contact to the W layer is made by Al-metallizing the back of the Si wafer, and the 10 nm-thick HfO 2 dielectric layer was grown by ALD [45], see Fig. 1a.…”
Section: Device Description and Measurementmentioning
confidence: 99%
“…Moreover, to shed light on the purely numerical procedures that lay behind the extraction process, we have also incorporated comprehensive and physically-based kinetic Monte Carlo (kMC) simulations. In doing so, we pursue the analysis of the step-by-step evolution of conductive filaments (CF) along the device set and reset processes [39][40][41][42][43][44], taking into consideration that our devices show filamentary conduction [45]. We deepen on the physical mechanisms that control the formation and rupture of percolation paths (the conductive filaments) within a microscopic simulation that includes the 3D solution of the thermal and Poisson equations along with the RS dynamics described by a kinetic Monte Carlo algorithm [39,41].…”
Section: Introductionmentioning
confidence: 99%
“…Another memristive device was presented with ALD encapsulation of 10 nm HfO 2 film at 225 °C using TDMAH and H 2 O as precursors and N 2 as carrier and purge gas. The device structure was TiN/Ti/HfO 2 /W on a 100 mm diameter Si-n ++ wafer [147,148]. A1N based memristor devices were presented [149].…”
Section: B Pdms Encapsulationmentioning
confidence: 99%