Methods and applications of plasmatron high rate sputtering in microelectronics, hybrid microelectronics and electronics

Schiller, S.; Heisig, U.; Goedicke, K.; Bilz, H.; Steinfelder, K.

doi:10.1016/0040-6090(82)90190-0

Cited by 16 publications

(2 citation statements)

References 18 publications

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“…Tin oxide (SnO 2 ) is one of the most important n-type wide-band gap (3.6 eV) semiconductor. Its unique conductance has been utilized for various applications like gas sensors [1], microelectronics [2], solar cells [3] and photoelectrochemistry [4]. The compound has also been examined as possible electrode material for lithium cells [5] and photocatalysts [6].…”

Section: Introductionmentioning

confidence: 99%

Effect of Mn doping on the structural and optical properties of SnO2 nanoparticles

Azam

Ahmed

Habib

et al. 2012

Journal of Alloys and Compounds

139

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Section: Introductionmentioning

confidence: 99%

Effect of Mn doping on the structural and optical properties of SnO2 nanoparticles

Azam

Ahmed

Habib

et al. 2012

Journal of Alloys and Compounds

139

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“…It has a wide band gap (3.6 eV) and is a n-type semiconductor. It has its utility in various applications, viz., gas sensors 8 , microelectronics 9 , solar cells 10 , and photoelectrochemistry 11 due to its unique conductance. It is also used as electrode material for lithium cells 12 and as photocatalysts 13 .…”

Section: Introductionmentioning

confidence: 99%

Controlled Synthesis of Nanomaterials using Reverse Micelles

Vaidya¹,

Ahmed²,

Ganguli³

2008

DSJ

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Monophasic nanosized oxides were synthesised mainly from metal oxalate nanorods obtained using the reverse micellar method. This paper focuses on the methodology to obtain important metal oxides like tin dioxide, cerium oxide (CeO 2 ), zirconia, and zinc oxide. The effect of oxidation state of the metal ion on the morphology of the oxalates was studied. Nanorods of zinc (II) oxalate (120 nm in dia and 600 nm in length) were obtained while spherical particles of size 4 6 nm were obtained for cerium (III) oxalate. The decomposition of these precursors at higher temperature led to the formation of their respective oxides. Mixture of nanorods and nanoparticles of CeO 2 was obtained while 34 nm sized ZrO 2 nanoparticles were obtained by thermal decomposition of zirconium oxalate precursor. The dielectric constant and loss were highly stable with frequency (at room temperature) for both ceria and zirconia nanoparticles. ZnO nanoparticles (55 nm sized) were obtained by the decomposition of zinc oxalate nanorods. Three peaks corresponding to free excitonic emission, free-to-bound, and donor-acceptor transitions were observed in the photoluminescence studies at 20 K for ZnO nanoparticles.

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Metal Oxide Nanoparticles

Fernández-García¹,

Rodgriguez²

2017

Design of Nanostructures

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This chapter covers the fundamental science, synthesis, characterization, physicochemical properties and applications of oxide nanomaterials. Explains fundamental aspects that determine the growth and behavior of these systems, briefly examines synthetic procedures using bottom-up and top-down fabrication technologies, discusses the sophisticated experimental techniques and state of the art theory results used to characterize the physico-chemical properties of oxide solids and describe the current knowledge concerning key oxide materials with important technological applications.

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Methods and applications of plasmatron high rate sputtering in microelectronics, hybrid microelectronics and electronics

Cited by 16 publications

References 18 publications

Effect of Mn doping on the structural and optical properties of SnO2 nanoparticles

Effect of Mn doping on the structural and optical properties of SnO2 nanoparticles

Controlled Synthesis of Nanomaterials using Reverse Micelles

Metal Oxide Nanoparticles

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