“…The new generation of micro-electro-mechanical systems (MEMS)-based heating holders were developed to mitigate these limitations and are, therefore, nowadays widely used for in situ TEM studies (Allard et al, 2009;Kumar et al, 2020;Mele et al, 2016;Pérez Garza et al, 2017;Van Huis et al, 2009;van Omme, Zhakozheva, Spruit, Sholkina, & Perez-Garza, 2018). These advanced MEMS-based holders are advantageous as a result of: (1) the small thermal mass of MEMS microheaters resulting in reduced sample drift (Allard et al, 2009;Gaulandris et al, 2020;Perez-Garza et al, 2016), (2) the fast heater response time enabling rapid heating and cooling experiments (up to 10 6 C/s) (Allard et al, 2009;Gaulandris et al, 2020;Mele et al, 2016;Spruit, van Omme, Ghatkesar, & Perez-Garza, 2017), and (3) the high temperature homogeneity (~99%) across the membrane and the sample within the viewing area (Mele et al, 2016;Spruit et al, 2017;, which allows for reliable and reproducible in situ TEM heating experiments.…”