Methods of harmful effects limitation in SAW gas sensors

Abstract

In this paper some problems concerning work stability of SAW NOz sensors employing copper phthalocyanine (PcCu) as the chemical interface and 128"YX lithium niobate as substrate are presented. The proposed sensing element consists of two delay lines: one of them is covered with a chemical coating (PcCu), the another is covered with AI and then PcCu. In this case a response of the sensor depends only on the conductivity changes of the PcCu layer during NO2 exposure. Other effects are identical and therefore are canceled.