2013
DOI: 10.1016/j.optcom.2013.01.004
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Metrology of non-thermal capacitively coupled N2–Ar mixture plasma

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Cited by 21 publications
(7 citation statements)
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“…A typical spectrum is shown in Figure S5 where N 2 alone was flowed onto 1.10 g of Cu wool and the spectrum was observed from the lower end of the quartz reactor. A very intense N 2 * band (C 3 Π u → B 3 Π g , a second positive band from an activated neutral nitrogen molecule) was observed with weak bands for N 2 * (B 3 Π g → A 3 Σ u , a first positive band), N 2 * (C″ 5 Σ u → A′ 5 Σ g , a Herman infrared band), N 2 + (B 2 Σ u + → X 2 Π g + , a first negative band), and NO (A 2 Σ 3+ → X 2 Π, a γ band) . The appearance of NO γ bands has widely been reported to be due to a trace level of oxygen impurity .…”
Section: Results and Discussionmentioning
confidence: 99%
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“…A typical spectrum is shown in Figure S5 where N 2 alone was flowed onto 1.10 g of Cu wool and the spectrum was observed from the lower end of the quartz reactor. A very intense N 2 * band (C 3 Π u → B 3 Π g , a second positive band from an activated neutral nitrogen molecule) was observed with weak bands for N 2 * (B 3 Π g → A 3 Σ u , a first positive band), N 2 * (C″ 5 Σ u → A′ 5 Σ g , a Herman infrared band), N 2 + (B 2 Σ u + → X 2 Π g + , a first negative band), and NO (A 2 Σ 3+ → X 2 Π, a γ band) . The appearance of NO γ bands has widely been reported to be due to a trace level of oxygen impurity .…”
Section: Results and Discussionmentioning
confidence: 99%
“…A very intense N 2 * band (C 3 Π u → B 3 Π g , a second positive band from an activated neutral nitrogen molecule) was observed with weak bands for N 2 * (B 3 Π g → A 3 Σ u , a first positive band), N 2 * (C″ 5 Σ u → A′ 5 Σ g , a Herman infrared band), N 2 + (B 2 Σ u + → X 2 Π g + , a first negative band), and NO (A 2 Σ 3+ → X 2 Π, a γ band) . The appearance of NO γ bands has widely been reported to be due to a trace level of oxygen impurity . In the current experiment, the intensity of the N 2 + emission bands was far lower than that of N 2 *.…”
Section: Results and Discussionmentioning
confidence: 99%
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“…where X 1i is the rate coefficient describing electron impact excitation from the ground level 1 to level i, [28][29][30]32] ∑ i> j A i j is the accumulative transition probability for spontaneous emission from the higher level i to all the other lower levels j, and N e , N 1 , N i are the electron density, ground level population density, and excited state population density, respectively.…”
Section: Calculated Methods Of Electron Temperaturementioning
confidence: 99%
“…Note, we suppose the plasma is optically thin. Furthermore, X 1i can be expressed as a simple expression related to T e [28][29][30][31][32]…”
Section: Calculated Methods Of Electron Temperaturementioning
confidence: 99%