“…One of the best tribological properties present fluoroalkylsilanes [26,27]. These compounds have low values of surface free energy, adhesive force, coefficient of friction, high thermal stability and contact angle values, and are promising alternative for overcoming the limitations of electromechanical devices' lifetime [28,29]. Mayer et al used fluoroalkylsilanes to control adhesion in microelectromechanical systems [30], Kushmerick et al showed that these compounds can play a role as antistiction layers in micromachines [31].…”