SPIE Proceedings
 1997
DOI: 10.1117/12.276001
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Micrascan III: performance of a third-generation catadioptric step-and-scan lithographic tool

Daniel R. Cote1,
Keith W. Andresen2,
David J. Cronin3
et al.
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“…The catadioptric KrF exposure equipment is currently available on a commercial basis from a US-based company (10). In designing catadioptric optics, the key element must be a concave mirror.…”
Section: Optical Configurationmentioning
confidence: 99%

A survey of advanced excimer optical imaging and lithography

Matsumoto1,
Suwa2
1998
The 1998 International Conference on Characterization and Metrology for ULSI Technology
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“…The catadioptric KrF exposure equipment is currently available on a commercial basis from a US-based company (10). In designing catadioptric optics, the key element must be a concave mirror.…”
Section: Optical Configurationmentioning
confidence: 99%

A survey of advanced excimer optical imaging and lithography

Matsumoto1,
Suwa2
1998
The 1998 International Conference on Characterization and Metrology for ULSI Technology
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0
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0
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Lithographic Projection Lenses

Groß1,
Blechinger2,
Achtner3
2008
Handbook of Optical Systems
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Mask Materials

Liberman1
2005
Handbook of Photomask Manufacturing Technology
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