Micro- and integrated optical devices in glasses and polymers for hybride integration into microsystems

Karthe, W.; Göring, R.; Bräuer, Andreas; Kley, E.‐B.; Wächter, Christoph; Dannberg, Peter; Possner, Torsten

doi:10.1007/bf01624464

Microsystem Technologies

1995

DOI: 10.1007/bf01624464

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Micro- and integrated optical devices in glasses and polymers for hybride integration into microsystems

W. Karthe

R. Göring²,

Andreas Bräuer³

et al.

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Cited by 2 publications

References 14 publications

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Microsystems technology: objectives

Fluitman

1996

Sensors and Actuators A: Physical

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This contribution focuses on the objectives of microsystems technology (MST). The mason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-temtories, for which standardization in terms of system modules aa. ,nterconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with 'applications' and 'genetic issaes' as the main characteristics.

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Microsystems technology: objectives

Fluitman

1996

Sensors and Actuators A: Physical

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Fabrication of polymeric lenses using magnetic liquid molds

Falahati

Zhou

et al. 2019

Applied Physics Letters

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Traditional molding and casting processes in optical manufacturing require sophisticated and expensive molds and molding equipment. In this work, magnetic liquid droplets were used as soft and deformable molds. The magnetic drop within an immiscible polymeric resin forms a conical shape at the interface due to the equilibrium of magnetostatic force and surface tension, which results in a plano–concave lens after curing. An apparatus was assembled to control the amplitude and gradient of the magnetic field. A Shack-Hartmann sensor was employed to measure the focal length of the formed polydimethylsiloxane lenses. The effects of magnetic field intensity, gradient of the magnetic field, and magnetic susceptibility were investigated. This technique is low cost, rapid, and straightforward and can be used for forming lenses with different sizes and shapes.

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Micro- and integrated optical devices in glasses and polymers for hybride integration into microsystems

Cited by 2 publications

References 14 publications

Microsystems technology: objectives

Microsystems technology: objectives

Fabrication of polymeric lenses using magnetic liquid molds

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