Microsystems Mechanical Design 2006
DOI: 10.1007/978-3-211-48549-1_7
|View full text |Cite
|
Sign up to set email alerts
|

Micro- and Nano-assembly and Manipulation Techniques for MEMS

Abstract: This paper presents a review of the most commonly used techniques for the assembly of micro-systems. Following a brief overview of the dominant forces working at this scale, the operation and design of mechanical, electrostatic, and magnetic micro-grippers is presented. The use of electrostatic forces is further described in the context of nano-assembly, where sub-micron-sized charged spots are used as the anchoring sites for nano-particles.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
(2 citation statements)
references
References 55 publications
0
2
0
Order By: Relevance
“…The ranges were calculated by carrying out a mathematical analysis of forces in microassembly combined with a statement-inference method for establishing critical dimensions [4,[7][8][9][10][11]. The force analysis was first carried out to evaluate gravitational, electrostafic, Van-der-Waals and capillary forces for a spherical part-planar surface system as described by Fearing [10] and Enikov [11]. Several simulations were run to predict forces by varying material properties of part and gripper, dielectric, distance between sphere and plane, contact angle and surface tension of liquid.…”
Section: Nd 3 Digit -Characteristic Dimensionmentioning
confidence: 99%
See 1 more Smart Citation
“…The ranges were calculated by carrying out a mathematical analysis of forces in microassembly combined with a statement-inference method for establishing critical dimensions [4,[7][8][9][10][11]. The force analysis was first carried out to evaluate gravitational, electrostafic, Van-der-Waals and capillary forces for a spherical part-planar surface system as described by Fearing [10] and Enikov [11]. Several simulations were run to predict forces by varying material properties of part and gripper, dielectric, distance between sphere and plane, contact angle and surface tension of liquid.…”
Section: Nd 3 Digit -Characteristic Dimensionmentioning
confidence: 99%
“…Another interesting example of microassembly is a commercial unit by Klocke Nanotechnik with four nanorobotics axes (X, Y, Z-stages plus microgripper) and a joystick, which is capable of carrying out assembly of glass fibers, laser diodes, RF-mixer, micro systems or the handling of thin wires, gears, SMD-chips and micro sensors [3]. Furthermore, considerable research has been done on the development of specific micro-assembly tools and methods including work on visual servoing, sensor-based assembly and a vacuum handling tool [4][5][6][7][8][9][10][11][12][13]. At the micro-assembly systems design and planning level, Kumiawan et al have reported an attempt at developing a morphological classification of hybrid microsystems assembly [4] and several research works dealing with the planning for assembly have also been reported [5][6].…”
Section: Introductionmentioning
confidence: 99%