The Micro Electrical Discharge Machining (Micro-EDM) process has proved to be an appropriate nonconventional machining method for manufacturing accurate and complex three-dimensional structural microfeatures which are difficult to be produced by conventional processes. However, the miniaturisation of the EDM process requests special requirements on the machining equipments. Pulse generators, which can produce small input energy pulses, and high precision systems are the two major criterions. In this paper, newly developed advanced technologies regarding to these aspects are explored with the aid of a commercial micro-EDM machine. First of all, by examining the pulses, innovative strategies implemented in the pulse generator are studied. Indepth research also reveals the correlation between the discharge pulses and the machine parameters in order to provide an indicative overview of process capability. Secondly, precision machining, which is represented by producing a three-dimensional micro-structure such as a micro-compressor, is demonstrated. Accordingly, by examining the machining geometry and surface integrity, process characteristics of micro-EDM are discussed.