Micro- and Nano-Scale Diagnostic Techniques for Thermometry and Thermal Imaging of Microelectronic and Data Storage Devices

Thermometry at the nanoscale

“…25,26 Furthermore, the precise mapping of the temperature of living cells, especially cancer cells that have higher temperatures than those of normal tissues due to the increased metabolic activity, 6,9,27 strongly improves the perception of their pathology and physiology and, in turn, the optimization of premature diagnosis and therapeutic processes (e.g. in hyperthermal tumour treatment and photodynamic therapy).…”

“…26 Early works on scanning microscopy-based thermometry employing diagnostic techniques 24,59,60 and either electrical or scanning probe microscopy (with a particular emphasis on microelectronics and data storage devices) 25 were available between 1999 and 2005. Three other reviews partially covering the subject and dealing with ceramic phosphors that can withstand extreme temperatures, 61 multiple optical chemical sensors 62 and temperature-stimuli polymers 63 have been published in 2011.…”

Realization of solid-state nanothermometer using Ge quantum-dot single-hole transistor in few-hole regime

“…[4][5][6] Relentless miniaturization of transistors for boosting drive current and speed has heightened the importance of localized heating problem and thus, nanoscale-spatially resolved temperature monitoring for local hot spots is central for thermal management and reliability analysis. 7 On the other hand, biology and medicine also demand for nanothermometers since real time, precise in vivo local temperature probing is essential in biomedical premature diagnosis and therapeutic process. 8 Apart from conventional thermometers, nanothermometry requires a new paradigm in the use of both material and thermometric properties to achieve the ultimate goals of wide-ranging accuracy, fast response, environmental/human benign, immunity to external parameters, robustness, and no need of calibration.…”

Transient submicron temperature imaging based on the fluorescence emission in an Er/Yb co-doped glass–ceramic

“…Understanding heat-transfer phenomena on the nano and submicron scales is crucial for the development of novel devices in the semiconductor industry [1,2] and biomedical sciences [3][4][5][6]. Although steady-state temperature measurements are well established for the thermal characterization of microstructures, the demand for transient temperature measurements of active micro-and nano-devices has stimulated the development of alternative, non-invasive measurement techniques.…”

“…Non-invasive techniques such as thermoreflectance [10][11][12], fluorescent thermometry [13][14][15][16][17], Raman thermometry [18][19][20], optical interferometry [2] and transmission electron microscopy [21] can achieve a submicron spatial resolution. However, most have very specific requirements that make them effective only under limited conditions [7,22,23].…”