Micro-beam sensor for detection of thermal conductivity of gases and liquids

Takamatsu, Hiroshi; Fukunaga, Takanobu; Tanaka, Yūki; Kurata, K.; Takahashi, Kazuhiko

doi:10.1016/j.sna.2013.11.019

Cited by 11 publications

(3 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Recently, with the advancement in micro-electro-mechanical systems (MEMSs), FG materials have been utilized to build various micro-structures in order to achieve high performance, which encourage researchers to investigate and predict the mechanical behaviors of FG micro-structures. In most cases, microbeams usually serve as the fundamental structures and the principal functional components in MEMSs [4][5][6] . As a consequence, it is of significance to provide insight into the dynamic behaviors of FG micro-beams before the design.…”

Section: Introductionmentioning

confidence: 99%

Transverse shear and normal deformation effects on vibration behaviors of functionally graded micro-beams

Wang

Sun

et al. 2020

Appl. Math. Mech.-Engl. Ed.

View full text Add to dashboard Cite

A quasi-three dimensional model is proposed for the vibration analysis of functionally graded (FG) micro-beams with general boundary conditions based on the modified strain gradient theory. To consider the effects of transverse shear and normal deformations, a general displacement field is achieved by relaxing the assumption of the constant transverse displacement through the thickness. The conventional beam theories including the classical beam theory, the first-order beam theory, and the higherorder beam theory are regarded as the special cases of this model. The material properties changing gradually along the thickness direction are calculated by the Mori-Tanaka scheme. The energy-based formulation is derived by a variational method integrated with the penalty function method, where the Chebyshev orthogonal polynomials are used as the basis function of the displacement variables. The formulation is validated by some comparative examples, and then the parametric studies are conducted to investigate the effects of transverse shear and normal deformations on vibration behaviors.

show abstract

Section: Introductionmentioning

confidence: 99%

Transverse shear and normal deformation effects on vibration behaviors of functionally graded micro-beams

Wang

Sun

et al. 2020

Appl. Math. Mech.-Engl. Ed.

View full text Add to dashboard Cite

show abstract

“…Recent developments in nanotechnology necessitates the analysis of structural elements in ultra-small scales. Micro and nanobeams are frequently used in nano-and micro-sized systems and devices such as sensors (Takamatsu et al, 2014;Shaat and Abdelkefi, 2015), resonators (Kacem et al, 2009;Chen et al, 2011) or actuators (Tian et al, 2016) and the accurate prediction of their behavior in micro/nano scales is of utmost importance. However, it is well-known that the classical theories of continuum mechanics fail to describe the behavior of micro-or nano-sized structures.…”

Section: Introductionmentioning

confidence: 99%

Variational formulations and isogeometric analysis for the dynamics of anisotropic gradient-elastic Euler-Bernoulli and shear-deformable beams

Yaghoubi

Balobanov

Mousavi

et al. 2018

European Journal of Mechanics - A/Solids

View full text Add to dashboard Cite

The strain and velocity gradient framework is formulated for centrosymmetric anisotropic Euler-Bernoulli and third-order shear deformable (TSD) beam models, reducible to Timoshenko beams. The governing equations and boundary conditions are obtained by using a variational approach. The strain energy is generalized to include strain gradients and a tensor of anisotropic static length scale parameters. The kinetic energy includes the velocity gradients and a tensor of anisotropic length scale parameters and hence the static and kinetic quantities of the centrosymmetric anisotropic material are distinguished in microscale and in the macroscale. Furthermore, the external work is written in the general form. Free vibration of a simply supported centrosymmetric anisotropic TSD beam is studied by using analytical solution as well as isogeometric analysis.

show abstract

“…In this paper, we propose a new method for measuring the in-plane thermal conductivity of deposited thin films using a micro-beam sensor. The sensor, which was originally developed for measuring the thermal conductivity of small samples of gases and liquids [26], is made of a beam-type thin metallic film suspended across a trench on the silicon substrate, which is used as a self-heating thermometer. The protocol consisted of measuring the temperature of the sensor, which was heated in a vacuum, and repeating the same procedure after the deposition of a sample film on the sensor.…”

Section: Introductionmentioning

confidence: 99%

Measurement of in-plane thermal and electrical conductivities of thin film using a micro-beam sensor: A feasibility study using gold film

Nishimura

Wang

Fukunaga

et al. 2016

International Journal of Heat and Mass Transfer

Self Cite

View full text Add to dashboard Cite

A new method is proposed for measuring the in-plane thermal conductivity of thin films using a freestanding micro-beam metallic sensor. The sensor is heated in a vacuum by DC to induce a temperature rise, which is determined from the electrical resistance of the sensor. The method consists of two protocols: measurement of a bare sensor before and after deposition of a sample film on its top surface. The thermal conductivity of the sample film is determined by comparing the measured temperature rise with that obtained through numerical analysis. This is based on the principle that the temperature rises of the sensor with and without a deposited film are different because of a difference in in-plane thermal conductance. In this study, measurement of a 20-nm-thick gold film was demonstrated by fabricating two platinum sensors of different widths. The measured thermal conductivities of the platinum sensors and gold film were significantly smaller than those of bulk materials. The relationship between the thermal and electrical conductivities was also discussed.

show abstract

Micro-beam sensor for detection of thermal conductivity of gases and liquids

Cited by 11 publications

References 20 publications

Transverse shear and normal deformation effects on vibration behaviors of functionally graded micro-beams

Transverse shear and normal deformation effects on vibration behaviors of functionally graded micro-beams

Variational formulations and isogeometric analysis for the dynamics of anisotropic gradient-elastic Euler-Bernoulli and shear-deformable beams

Measurement of in-plane thermal and electrical conductivities of thin film using a micro-beam sensor: A feasibility study using gold film

Contact Info

Product

Resources

About