Micro coil modeling — benefit and implementation of a permeable layer

Rehfuss, Sven; Marschner, Claudia; Peters, D.; Bolte, Hilmar; Laur, R.

doi:10.1016/s0026-2692(01)00098-2

Cited by 2 publications

(1 citation statement)

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“…Measurements at a frequency of 100 kHz showed that the 3 μm × 1 μm Galfenol layers increased the inductance from L 0 = 6.8 μH to L = 7.5 μH [17]. If these values are compared with the calculations of Rehfuß et al [18] the average relative permeability of the Galfenol layer is determined to about 20. A variation of the self-resonance frequency of 0.1% or of the inductance of 0.2% could be measured, when a 22 turn 2 mm × 10 mm planar coil was deposited on top of the Galfenol and a thin isolation layer and the relative permeability varied about 1% due to sensor bending.…”

Section: Bending Sensor Applicationmentioning

confidence: 81%

Improvement of sputtered Galfenol thin films for sensor applications

Adolphi¹,

McCord²,

Bertram³

et al. 2010

Smart Mater. Struct.

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Galfenol Fe 83 Ga 17 films are sputtered on Si wafers without, and with Ti or Ti/Cu metallic seed layers in order to obtain a magnetoelastic layer which is sensitive to bending deformations of the compound structure. The layer thicknesses range from 100 nm to 5 μm. Layer morphology, texture, and the Villari effect are examined. The texture of the Galfenol films is strongly influenced by the seed layer. No low-index texture components are found for films directly deposited on Si and SiO 2 . On Ti, a (111) texture is formed on layers with more than 1000 nm thickness. A favorable (110) fiber texture is formed on Ti/Cu. Deforming the bimorphs (Si + layer system) by 0.012%, the Villari effect is detected due to the change in relative permeability. The maximum change occurs for Galfenol films with a thickness of 1 μm on a Ti/Cu buffer layer. The films open a route to the incorporation of magnetoelastic films into integrated magnetoelastic sensor devices.

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Section: Bending Sensor Applicationmentioning

confidence: 81%