Micro Coils Fabricated By UV Depth Lithography And Galvanoplating

Löchel, Bernd; Maciossek, A.; Rothe, Martina; Windbracke, W.

doi:10.1109/sensor.1995.721796

Cited by 3 publications

(2 citation statements)

References 7 publications

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“…This method combines UV lithographic pattering of thick photoresist layers and a moulding technique for the resulting resist patterns by electrodeposition. Patterning of up to 100 µm thick resist layers with only a single UV exposure is reported [5]. Windings formed with this technique would be destroyed by a moving core because it is a surface micromachining technique, which provides no shelter for the windings.…”

Section: Sensor Designmentioning

confidence: 99%

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Micro-coil with movable core for application in an inductive displacement sensor

Velten¹,

Stefan²,

Obermeier³

1999

J. Micromech. Microeng.

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A new concept for a micro-coil is presented. The micro-coil will be used as a sensor that measures the flexion of fingers. For this purpose several micro-coils are mounted on a data glove. Though the coil is fabricated by means of silicon bulk micromachining it is possible to move an iron core through the coil without destroying the windings. The inductance of the full coil is 0.25 µH without a core and 7.2 µH with a core. The ohmic resistance has a value of 60 .

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Section: Sensor Designmentioning

confidence: 99%

“…Applications of planar coils can be magnetographic printing heads [1] or magnetically driven micro-valves [2]. 3D micro-coils are known as fluxgate magnetic sensors [3], eddy current micro-sensors [4] or as micro-transformers [5]. All these 3D coils are fabricated with an integrated core mostly made of electroplated NiFe.…”

Section: Introductionmentioning

confidence: 99%