Micro Electro-Mechanical Systems (MEMS), Inertial Measurements Unit (IMU) Common Guidance Program

Panhorst, David W; LeFevre, V.C.; Rider, Lynne K.

doi:10.1080/00150190600946393

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“…Most of the current MEMS or NEMS elements are made of Si microstructures that inherit the advantages of fabrication by planar processing techniques used in silicon microelectronic technology [5][6][7]. The use of microstructures made of polymers such as parylene as elements of MEMS or NEMS is less developed to date [8,9]. Due to its low elastic modulus, high structural flexibility, chemical robustness and ease of fabrication, parylene microstructures could play an important role in future MEMS or NEMS devices.…”

Section: Introductionmentioning

confidence: 99%

Measurements of Resonance Frequency of Parylene Microspring Arrays Using Atomic Force Microscopy

Gaire

Zandiatashbar

et al. 2011

MRS Proc.

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A mechanical vibration system was made by sandwiching an array of parylene-C microsprings between two flat plates of Si. This system was driven mechanically in forced oscillation using a piezo transducer attached to the bottom Si plate. An atomic force microscope was used to record the displacement of the top plate in both the contact and non-contact modes. At the resonance, the system was observed to give large vertical displacement amplitude of up to 100 nm with a Q-factor of up to 900.

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