1996
DOI: 10.1109/20.539194
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Micro electrostatic actuators in dual-stage disk drives with high track density

Abstract: This paper presents a dual-stage actuator for highdensity disk drive, using a voice coil motor (VCM) rotary actuator as a coarse actuator and a linear micro electrostatic actuator as a fine actuator. The micro electrostatic actuator proposed has trapezoidal static comb fingers and straight movable comb fingers. It has a linear static displacement voltage characteristic in a working range of 4 pm , sufficient for fine positioning of a readhvrite head. The actuator has a fast and stable dynamic response with a r… Show more

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Cited by 14 publications
(3 citation statements)
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“…The most common configurations are film motors [7][8][9][10], micromotors [11][12][13], linear inchworm motors [14][15], comb motors [16][17][18] and wobble motors [19][20]. These topologies are well known in the literature and their disadvantage is rather complex structure and sophisticated control.…”
Section: Introductionmentioning
confidence: 99%
“…The most common configurations are film motors [7][8][9][10], micromotors [11][12][13], linear inchworm motors [14][15], comb motors [16][17][18] and wobble motors [19][20]. These topologies are well known in the literature and their disadvantage is rather complex structure and sophisticated control.…”
Section: Introductionmentioning
confidence: 99%
“…[6] A dual-stage actuator for high-density HDDs was presented, using a voice coil motor as a coarse actuator and a linear microelectrostatic actuator as a fine actuator. [7] Electromagnetic microactuators were fabricated using the state-of-the-art silicon micromachining techniques. [8] A highperformance moving-magnet rotary actuator was also developed for very low -profile magnetic disk drives.…”
Section: Introductionmentioning
confidence: 99%
“…It had a linear static displacement-voltage characteristic in a working range of 4 µm. The microactuator system could achieve a 10 kHz bandwidth [11].…”
Section: Introductionmentioning
confidence: 99%