Micro force sensor with piezoresistive amorphous carbon strain gauge

Peiner, Erwin; Tibrewala, A.; Bandorf, Ralf; Biehl, Saskia; Lüthje, H.; Doering, Lutz

doi:10.1016/j.sna.2005.11.059

Cited by 65 publications

(44 citation statements)

References 21 publications

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“…Recently piezoresistive effect in diamond like carbon films was found . Piezoresistive gauge factor comparable with the gauge factor of the main material of the semiconducting strain gauges silicon was reported [4][5][6][7][8][9][10]. Thus, in combination with the beneficial properties mentioned above, diamond like carbon films became an attractive material for fabrication of the advanced sensors capable to work in different harsh environments [14,[26][27][28][29][30][31][32].…”

Section: Introductionmentioning

confidence: 99%

Piezoresistive properties of diamond like carbon films containing copper

Meškinis

Gudaitis

Vasiliauskas

et al. 2015

Diamond and Related Materials

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Section: Introductionmentioning

confidence: 99%

Piezoresistive properties of diamond like carbon films containing copper

Meškinis

Gudaitis

Vasiliauskas

et al. 2015

Diamond and Related Materials

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“…11 In the present work the authors have integrated a-C films as strain gauges on a boss membrane. The side view of the left half of such a boss membrane is shown in the Fig.…”

Section: Sensor Fabrication and Characterisationmentioning

confidence: 99%

Piezoresistive effect in amorphous carbon thin films

Tibrewala¹,

Peiner²,

Bandorf³

et al. 2007

Materials Science and Technology

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In this contribution amorphous carbon (a-C) films are integrated as strain gauges in micromachined silicon boss membranes. Sputter deposited a-C films have high hardness and < 2 % hydrogen content in it. The tribological properties of the a-C films are comparable with diamond and can be used for hard coatings. The films have very low resistivity which decreases with the temperature. Current voltage characteristics of a-C/oxide Si shows Ohmic behaviour. Variable range hopping mechanism is dominant at low temperatures and is thermally activated at room temperature and at higher temperatures. Piezoresistive gauge factor are measured in the temperature range 23-50 degrees C

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“…Regarding the thin film based piezoresistive sensors for harsh environments, in literature has been reported mainly strain gauges (Fraga et al 2010;Peiner et al 2006) and pressure sensors (Malhaire and Barbier 2003;Fraga et al 2011a;Wu et al 2001).…”

Section: Introductionmentioning

confidence: 99%

Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application

et al. 2012

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The use of thin films as sensing elements for microsensor applications has been shown very attractive due to their low-cost fabrication, potential for integration with standard CMOS technologies and possibility of deposition on different substrate types. In particular, piezoresistive sensors based on thin films have been commonly developed because can be easily implemented using microfabrication processes and present the best relation between sensitivity and system complexity, which showing great advantages in term of device integration. In our previous works (Fraga et al. 2010(Fraga et al. , 2011a, we studied undoped and nitrogen-doped PECVD a-SiC thin films as alternative materials to replace the silicon piezoresistors in strain and pressure sensors for harsh environments. Here, we focused our attention on the piezoresistive properties of sputtered silicon carbide (SiC), diamond-like carbon (DLC) and titanium dioxide (TiO 2 ) thin films. These materials were evaluated in terms of sensitivity or gauge factor and of the influence of the temperature on this sensitivity, allowing a preliminary analysis of the applicability of these thin films in high temperature piezoresistive sensors.

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Micro force sensor with piezoresistive amorphous carbon strain gauge

Cited by 65 publications

References 21 publications

Piezoresistive properties of diamond like carbon films containing copper

Piezoresistive properties of diamond like carbon films containing copper

Piezoresistive effect in amorphous carbon thin films

Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application

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