Micro gas-flow sensor with integrated heat sink and flow guide

Qiu, Li; Hein, Stefan; Obermeier, Ε.; Schubert, Axel

doi:10.1016/s0924-4247(97)80012-x

Cited by 46 publications

(25 citation statements)

References 1 publication

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…In the same year, Qiu et al (1996) presented a micro gasflow sensor with an integrated heat sink and a flow guide for gas-flow sensing applications with high sensitivity (700 mV at a flow velocity of 2.7 m/s and a supply voltage of 3 V), low power consumption (8 mW at 55 K over-temperature and an airflow velocity of 0.8 m/s) and short response time (lower than 150 ms). The chip and the diaphragm size were 4 mm 9 6 mm and 1.5 mm 9 2.0 mm, respectively.…”

Section: Thermal Flow Sensorsmentioning

confidence: 99%

MEMS-based gas flow sensors

Wang

Chen

Chang

et al. 2009

Microfluid Nanofluid

152

View full text Add to dashboard Cite

Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements, sensors, actuators, and electronics on a single silicon substrate in order to accomplish a multitude of different tasks in a diverse range of fields. The potential for device miniaturization made possible by MEMS micro-fabrication techniques has facilitated the development of many new applications, such as highly compact, non-invasive pressure sensors, accelerometers, gas sensors, etc. Besides their small physical footprint, such devices possess many other advantages compared to their macro-scale counterparts, including greater precision, lower power consumption, more rapid response, and the potential for low-cost batch production. One area in which MEMS technology has attracted particular attention is that of flow measurement. Broadly speaking, existing micro-flow sensors can be categorized as either thermal or non-thermal, depending upon their mode of operation. This paper commences by providing a high level overview of the MEMS field and then describes some of the fundamental thermal and nonthermal micro-flow sensors presented in the literature over the past 30 years or so.Keywords Cantilever type flow sensor Á Differential pressure flow sensor Á Lift force flow sensor Á Micro-electro-mechanical systems Á Resonating flow sensor Á Thermal flow sensor Origin and applications of MEMS technologyThe concept of micro-electro-mechanical systems (MEMS) dates back to the early 1960s, but only became an achievable reality when the tools and techniques originally developed for integrated circuit (IC) manufacturing became sufficiently advanced. Whereas electronic semiconductor devices are fabricated using IC process sequences, MEMS devices are produced by selectively etching away parts of the underlying silicon wafer or adding and patterning additional metallic and polymer layers to form the required mechanical and electromechanical devices. Typical MEMs micro-fabrication techniques include deposition [e.g. electroplating, sputtering, chemical vapor deposition (CVD), etc.], photolithography, and etching (e.g. wet etching, reactive ion etching (RIE), etc.]. Although still an emerging technology, MEMS devices are being increasingly deployed for mainstream commercial and industrial applications such as pressure sensors, accelerometers, gas sensors, RF switches, micro-mirrors, etc. (Löfdahl and Gadel-Hak 1999). In addition to the obvious advantages accruing from their diminutive scale (including a greater portability, a more discrete implementation and a reduced power consumption), MEMS devices permit the bulk

show abstract

Section: Thermal Flow Sensorsmentioning

confidence: 99%

MEMS-based gas flow sensors

Wang

Chen

Chang

et al. 2009

Microfluid Nanofluid

152

View full text Add to dashboard Cite

show abstract

“…Many previous studies have demonstrated the successful application of MEMS techniques to the fabrication of a variety of flow sensors capable of detecting both the flow rate and the flow direction [1-15]. Broadly speaking, MEMS-based gas flow sensors can be categorized as either thermal or non-thermal, depending upon their mode of operation.…”

Section: Introductionmentioning

confidence: 99%

A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure

Wang

Lee

Chiang

2007

Sensors

184

133

View full text Add to dashboard Cite

This paper presents a micro-scale air flow sensor based on a free-standing cantilever structure. In the fabrication process, MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitride layer to form a piezoresistor, and the resulting structure is then etched to create a freestanding micro-cantilever. When an air flow passes over the surface of the cantilever beam, the beam deflects in the downward direction, resulting in a small variation in the resistance of the piezoelectric layer. The air flow velocity is determined by measuring the change in resistance using an external LCR meter. The experimental results indicate that the flow sensor has a high sensitivity (0.0284 Ω/ms-1), a high velocity measurement limit (45 ms-1) and a rapid response time (0.53 s).

show abstract

“…It is the result of chemical reactions between the surface atoms and the etchant phase molecules. Wet etching is a popular process for the creation of microstructures in a wide range of applications, such as pressure sensors [20], gas-flow sensors [21] or micro-switches [22]. In this process, the advancing front propagates with a different rate depending on the crystallographic direction.…”

Section: Physical Model For Wet Etchingmentioning

confidence: 99%

Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces

Ferrando

Gosálvez

Cerdá

et al. 2011

Computer Physics Communications

View full text Add to dashboard Cite

Presently, dynamic surface-based models are required to contain increasingly larger numbers of points and to propagate them over longer time periods. For large numbers of surface points, the octree data structure can be used as a balance between low memory occupation and relatively rapid access to the stored data. For evolution rules that depend on neighborhood states, extended simulation periods can be obtained by using simplified atomistic propagation models, such as the Cellular Automata (CA). This method, however, has an intrinsic parallel updating nature and the corresponding simulations are highly inefficient when performed on classical Central Processing Units (CPUs), which are designed for the sequential execution of tasks. In this paper, a series of guidelines is presented for the efficient adaptation of octree-based, CA simulations of complex, evolving surfaces into massively parallel computing hardware. A Graphics Processing Unit (GPU) is used as a cost-efficient example of the parallel architectures. For the actual simulations, we consider the surface propagation during anisotropic wet chemical etching of silicon as a computationally challenging process with a wide-spread use in microengineering applications. A continuous CA model that is intrinsically parallel in nature is used for the time evolution. Our study strongly indicates that parallel computations of dynamically evolving surfaces simulated using CA methods are significantly benefited by the incorporation of octrees as support data structures, substantially decreasing the overall computational time and memory usage.

show abstract

Micro gas-flow sensor with integrated heat sink and flow guide

Cited by 46 publications

References 1 publication

MEMS-based gas flow sensors

MEMS-based gas flow sensors

A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure

Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces

Contact Info

Product

Resources

About