Micro groove structure with multi-station combination electrode by EDM

Man-cang, 宋满仓 Song; Wen-ming, 李文明 Li; Ying, 刘莹 Liu; Chong, 刘冲 Liu

doi:10.3788/ope.20152312.3371

光学精密工程

2015

DOI: 10.3788/ope.20152312.3371

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Micro groove structure with multi-station combination electrode by EDM

宋满仓 Song Man-cang¹,

李文明 Li Wen-ming²,

刘莹 Liu Ying³

et al.

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Micro groove structure with multi-station combination electrode by EDM

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