Micro-hotplates for thermal characterisation of structural materials of MEMS

Csíkvári, Péter; Fürjes, Péter; Dücs, Cs.; Bársony, I.

doi:10.1016/j.mejo.2008.05.004

Cited by 3 publications

(4 citation statements)

References 11 publications

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“…These include catalytic gas sensors for the detection of combustible gases [7,8], high temperature microreactors for analysis of oxidation reactions [9,10], systems for characterization of thermo-conductive properties of thin films (e.g. lateral thermal conductivity) [11,12], gas flow-and gas direction meters [13], gas and liquid MEMS-based differential scanning microcalorimeters [14][15][16][17] and bioreactors facilitating thermal analysis [18,19]. The geometrical configuration of micro hotplates commonly comprises resistive heating and temperature sensing microstructures or even miniaturized hot spots [20].…”

Section: Overview Of Micro Hotplate Sensors and Applicationsmentioning

confidence: 99%

Low power micro-calorimetric sensors for analysis of gaseous samples

Vereshchagina

Tiggelaar

Sanders

et al. 2015

Sensors and Actuators B: Chemical

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Section: Overview Of Micro Hotplate Sensors and Applicationsmentioning

confidence: 99%

Low power micro-calorimetric sensors for analysis of gaseous samples

Vereshchagina

Tiggelaar

Sanders

et al. 2015

Sensors and Actuators B: Chemical

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“…As another illustrative example, Figure 8 compares FEM results and our model when studying the influence of a spread of ±0.7 [W/m.K] in the thin film thermal conductivity value of 4.5 [W/m.K] [ 31 ] of the silicon nitride membrane (non-stoichiometric silicon nitride membranes can have much higher values of the thermal conductivity [ 34 ]; we, however, prefer to consider values given in [ 31 ] as this paper also contains an experimental data on the spread of the thermal conductivity; however, of course, our model can be applied to any values of the design parameters. Clearly, the spread in the thermal conductivity significantly influences both the average temperature in hot region T h and maximum temperature difference in hot region Δ T h .…”

Section: Comparison With Fem Simulationsmentioning

confidence: 99%

An Accurate and Computationally Efficient Model for Membrane-Type Circular-Symmetric Micro-Hotplates

Khan

Falconi

2014

Sensors

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Ideally, the design of high-performance micro-hotplates would require a large number of simulations because of the existence of many important design parameters as well as the possibly crucial effects of both spread and drift. However, the computational cost of FEM simulations, which are the only available tool for accurately predicting the temperature in micro-hotplates, is very high. As a result, micro-hotplate designers generally have no effective simulation-tools for the optimization. In order to circumvent these issues, here, we propose a model for practical circular-symmetric micro-hot-plates which takes advantage of modified Bessel functions, computationally efficient matrix-approach for considering the relevant boundary conditions, Taylor linearization for modeling the Joule heating and radiation losses, and external-region-segmentation strategy in order to accurately take into account radiation losses in the entire micro-hotplate. The proposed model is almost as accurate as FEM simulations and two to three orders of magnitude more computationally efficient (e.g., 45 s versus more than 8 h). The residual errors, which are mainly associated to the undesired heating in the electrical contacts, are small (e.g., few degrees Celsius for an 800 °C operating temperature) and, for important analyses, almost constant. Therefore, we also introduce a computationally-easy single-FEM-compensation strategy in order to reduce the residual errors to about 1 °C. As illustrative examples of the power of our approach, we report the systematic investigation of a spread in the membrane thermal conductivity and of combined variations of both ambient and bulk temperatures. Our model enables a much faster characterization of micro-hotplates and, thus, a much more effective optimization prior to fabrication.

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“…[10,27] To date however, the extent of diamonds use within such devices has been as a heat-spreading layer to ensure uniform thermalization, or as a resistant capping layer for use in harsh environments. [28,29] The aim of this work is therefore to investigate the utilization of scalable, thin-film polycrystalline diamond (PCD) within single layer micro-hotplates. Emission from the resulting borondoped PCD devices was characterized upon steady-state biasing through the use of two distinct optical setups, and the resulting temperatures extracted and cross-checked.…”

Section: Introductionmentioning

confidence: 99%

“…[ 10,27 ] To date however, the extent of diamonds use within such devices has been as a heat‐spreading layer to ensure uniform thermalization, or as a resistant capping layer for use in harsh environments. [ 28,29 ]…”

Section: Introductionmentioning

confidence: 99%

Polycrystalline Diamond Micro‐Hotplates

Thomas,

Stritt,

Mandal

et al. 2023

Small

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Micro‐hotplate structures are increasingly being investigated for use in a host of applications ranging from broadband infra‐red sources within absorption‐based gas sensors to in situ heater stages for ultra‐high‐resolution imaging. With devices usually fabricated from a conductive electrode placed on top of a freestanding radiator element, coefficient of thermal expansion (CTE) mismatches between layers and electro‐migration within the heating element typically lead to failure upon exceeding temperatures of 1600 K. In an attempt to mitigate such issues, a series of hotplates of varying geometry have been fabricated from a single layer of mechanically robust, high thermal conductivity, and low CTE boron‐doped polycrystalline diamond. Upon testing under high vacuum conditions and characterization of the emission spectra, the resulting devices are shown to exhibit a grey‐body like emission response and reach temperatures vastly in excess of conventional geometries of up to 2731 K at applied powers of ⩽100 mW. Characterization of the thermalization time meanwhile demonstrates rapid millisecond response times, while Raman spectroscopy reveals the performance of the devices is dictated by cumulative graphitization at elevated temperatures. As such, both diamond and sp2 carbon are shown to be promising materials for the fabrication of next‐generation micro‐hotplates.

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Micro-hotplates for thermal characterisation of structural materials of MEMS

Cited by 3 publications

References 11 publications

Low power micro-calorimetric sensors for analysis of gaseous samples

Low power micro-calorimetric sensors for analysis of gaseous samples

An Accurate and Computationally Efficient Model for Membrane-Type Circular-Symmetric Micro-Hotplates

Polycrystalline Diamond Micro‐Hotplates

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