TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (
DOI: 10.1109/sensor.2003.1215330
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Micro-jet nozzle array for precise droplet metering and steering having increased droplet deflection

Abstract: We present the architecture and fabrication method of a fluidic device with increased droplet deflection. The device is capable of producing picoliter size droplets precisely and steering them. The precision is a consequence of the reproducibility of the nozzles that are made using VLSI technology and tools. In addition, the droplet size is determined by the precise timing of applied heat pulses. We present both experimental and modeling results.

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Cited by 5 publications
(4 citation statements)
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“…Drop-on-demand uses pulses, generated either thermally or piezoelectrically, to eject solution droplets from a reservoir through a nozzle. Figure a shows a thermal inkjet printhead . In this device, electrical pulses applied to heaters that reside near the nozzles generate joule heating to vaporize the ink locally (heating temperature ∼ 300 °C for aqueous inks).…”
Section: 42 Inkjet Printingmentioning
confidence: 99%
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“…Drop-on-demand uses pulses, generated either thermally or piezoelectrically, to eject solution droplets from a reservoir through a nozzle. Figure a shows a thermal inkjet printhead . In this device, electrical pulses applied to heaters that reside near the nozzles generate joule heating to vaporize the ink locally (heating temperature ∼ 300 °C for aqueous inks).…”
Section: 42 Inkjet Printingmentioning
confidence: 99%
“…Bottom inset shows SEM image of the thermal inkjet printhead. (Reprinted with permission from ref . Copyright 2003 IEEE.)…”
Section: 42 Inkjet Printingmentioning
confidence: 99%
“…Uses of dry etching processes [1,8,9] have also been reported. In many cases [8][9][10] the integration of other devices such as heaters and piezoelectric elements along with the nozzle are reported. In all these cases, the external geometry of the nozzle array is essentially planar, i.e., the nozzle orifice is surrounded by a planar surface.…”
Section: Introductionmentioning
confidence: 99%
“…There is increasing engineering and industrial interest in micro-fluidics, for example with the development of lab-on-chip devices, MEMS, electrospraying, micro-ink-jet printing, and the manufacture of pharmaceuticals, fine chemicals, small particles and powders. See Ahn et al (2005), Anagnostopoulos et al (2003), Anna et al (2005), Basaran (2002), Brenner et al (2005), Chatterjee et al (2005), Chwalek et al (2002), Daneshbod et al (2005), Delametter et al (2002), Dupont et al (2005), Furlani et al (2001), Furlani (2005a, Jang et al (2005), Kerbage et al (2005), Krupenkin et al (2005), Loscertales et al (2002), Morini et al (2005), Moseler and Landman (2000), Mukherjee et al (2005), Quake (2005), Sirringhaus et al (2000), Tabeling et al (2005), Wang et al (2005), Wu et al (2005), Xuan et al (2005), Ye et al (2005) and Zheng et al (2005) for some varied examples of some of the most recent work in microfluidics in other problems.…”
Section: Introductionmentioning
confidence: 99%