Micro Machining of Plastics for Optical Components by Elliptical Vibration Cutting

Abstract

In the present research ， a ultra − precision diamond cuttihg ofthermo ・ p ］ astic mat ¢ ria！ s， polycarbonate ( PC ) and cyclic o ) efin po ｝ ymer ( ZEONIX ) ， is carried out by applying a method named ultrasonic elJiptical vibration cutti口g developed by the au 重 hors ， It is experimenIa ］ ly proved that good ． optical surfaces are obtained by applyjng the elhpticaI vibration cutting in cases of ' machining of symmetrical and dissymmetrical V grooves as compared with the conventional diamond cutting ． The surface roughness of dissymmetrical V grooves obtained by the ultrasonic elliptical vibration cutting is 10nmRz and 41 nmRz fbr PC and ZEONEX ， respectively ，

Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator

“…This step is to release the movable parts, such as beams, mirror plate and movable comb fingers, by removing the remaining PMMA layer by utilizing the elliptical vibration cutting method [32,33] (figure 3(e)). In this cutting process, the tool was vibrated elliptically at high frequency as shown schematically in figure 7.…”