Micro Motion Amplification–A Review

Abstract

Many motion-active materials have recently emerged, with new methods of integration into actuator components and systems-on-chip. Along with established microprocessors, interconnectivity capabilities and emerging powering methods, they offer a unique opportunity for the development of interactive millimeter and micrometer scale systems with combined sensing and actuating capabilities. The amplification of nanoscale material motion to a functional range is a key requirement for motion interaction and practical applications, including medical micro-robotics, micro-vehicles and micro-motion energy harvesting. Motion amplification concepts include various types of leverage, flextensional mechanisms, unimorphs, micro-walking / micro-motor systems, and structural resonance. A review of the research stateof-art and product availability shows that the available mechanisms offer a motion gain in the range of 10. The limiting factor is the aspect ratio of the moving structure that is achievable in the microscale. Flexures offer high gains because they allow the application of input displacement in the close vicinity of an effective pivotal point. They also involve simple and monolithic fabrication methods allowing combination of multiple amplification stages. Currently, commercially available motion amplifiers can provide strokes as high as 2% of their size. The combination of high-force piezoelectric stacks or unimorph beams with compliant structure optimization methods is expected to make available a new class of high-performance motion translators for microsystems.

A pipeline inspection robot for navigating tubular environments in the sub-centimeter scale

“…The anchoring units need to transform the axial elongation/contraction of the DEA into the radial expansion/shrinking of the anchor’s contact points (we name these contact points as feet) with the pipeline’s inner wall. Here, we adopted a classical flextensional motion amplification structure ( 30 ) and designed six chains distributed equally along its circumference as shown in Fig. 1A.…”

A comparative review of artificial muscles for microsystem applications

“…For instance, an amplified piezoelectric actuator based on a piezo-hydraulic pump has been developed recently 124 . Kiziroglou et al recently reviewed strategies and corresponding performances for micromotion amplification 125 . Figure 6c shows a high-precision millimeter-scale Delta robot 126 .…”

Evaluation Platform for MEMS-Actuated 3D-Printed Compliant Structures

“…Further increase of their motion range can be achieved by employing mechanical systems that amplify or translate a given motion input. Such systems are based on one or more leverage mechanisms, such as direct lever, beam buckling, or expansion mismatch between stacked material layers [13]. They can improve the performance and expand the applicability of actuators, sensors and motion power transducers.…”